Dielectric properties of oxide structures by a laser-based direct-writing method
- PDF / 674,884 Bytes
- 6 Pages / 612 x 792 pts (letter) Page_size
- 37 Downloads / 151 Views
P. Atanassova and T. Kodas Superior Micropowders, Albuquerque, New Mexico 87109 (Received 21 August 2000; accepted 23 March 2001)
Matrix-assisted pulsed laser evaporation direct-write (MAPLE-DW) is a laser-based method of directly writing mesoscopic patterns of electronic materials. Patterns of composite BaTiO3 /SiO2 /TiO2 dielectric material were written onto Pt/Au interdigitated-electrode test structures, with precise control over final dielectric properties. Scanning electron microscopy indicates random close-packed structures of BaTiO3 and SiO2 particles, with interstitial spaces partially filled with titania. Depending on the BaTiO3:silica ratio, the dielectric constant ranged from 5 to 55 and followed a 4-component logarithmic rule of mixing. This work demonstrates that the transfer process and the final material properties of MAPLE-DW oxide materials are largely decoupled.
I. INTRODUCTION
The use of miniaturized electronics in all areas of technology has increased exponentially in recent years. This has created enormous, diversified markets for electronic devices. Issues such as performance, size, weight, and cost have created a need for new fabrication technologies and materials, from the chip level to the system level. An acceleration of product cycles, an increased number of limited-production products, and the desire for just-intime manufacturing, all have placed strain on traditional development methods. While simulations are widely used to improve the design cycle, prototyping will always be necessary. This has created a need for electronics rapid prototyping technologies, similar to those used in structural metallurgy and polymer applications.1,2 Recently, the technical approach of laser-induced forward transfer (LIFT)3 and the materials transfer process of matrix-assisted pulsed laser evaporation (MAPLE)4 have been integrated to create a deposition method known as MAPLE direct-write (MAPLE-DW). This technique combines many of the advantages of LIFT (nonlithographic, serial or parallel deposition, laserbased), with the flexibility and “soft-transfer” characteristics of MAPLE.5,6 As shown in Fig. 1, MAPLE-DW uses a focused ultraviolet laser pulse to transfer material from a coating on a transparent carrier, known as a “ribbon”, onto a substrate. The ribbon–substrate separation is typically 10–100 m. The laser pulse impacts the material by propagating normally through the ribbon and striking the material/ribbon interface. The material 1720
http://journals.cambridge.org
J. Mater. Res., Vol. 16, No. 6, Jun 2001 Downloaded: 18 Mar 2015
strongly absorbs the laser light at the interface, causing extreme localized heating and evaporation of a small portion of the coating. This effect releases and propels material onto the substrate, and the result of this process has been shown to be a high-resolution transfer of material. The fundamental transfer mechanism of MAPLEDW has not been completely investigated, and the effect of the laser-based transfer on final material properties has remained a topic of de
Data Loading...
