Electron Beam Processing of Semiconductors
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ELECTRON BEAM PROCESSING OF SEMICONDUCTORS B. AHMED AND R.A. McMAHON Cambridge University Engineering Department, Trumpington Street, Cambridge, England, CB2 IPZ ABSTRACT Electron beams can transfer energy very efficiently to semiconductors. Systems have been developed for rapid heating to temperature around 10000C under a variety of conditions from adiabatic to isothermal. Pulsed, focused, line and synthesized shaped beams are used to obtain a wide range of thermal cycles. The following applications are described: the annealing of ion-implanted Si, particularly the activation of As implants and shallow implants (Rp
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