Introduction to Microsystem Design
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro
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Werner Karl Schomburg
Introduction to Microsystem Design Second Edition
RWTHedition
RWTH Aachen University
More information about this series at http://www.springer.com/series/7858
Werner Karl Schomburg
Introduction to Microsystem Design Second Edition
123
Werner Karl Schomburg Konstruktion und Entwicklung von Mikrosystemen (KEmikro) RWTH Aachen Aachen Germany
ISSN 1865-0899 RWTHedition ISBN 978-3-662-47022-0 DOI 10.1007/978-3-662-47023-7
ISSN 1865-0902
(electronic)
ISBN 978-3-662-47023-7
(eBook)
Library of Congress Control Number: 2015939801 Springer Heidelberg New York Dordrecht London © Springer-Verlag Berlin Heidelberg 2011, 2015 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper Springer-Verlag GmbH Berlin Heidelberg is part of Springer Science+Business Media (www.springer.com)
Preface
This second edition of “Introduction to Microsystem Design” corrects errors found in the previous version of the book and is extended by a chapter on electrical measurements, 8 tables, 14 figures, 57 equations, and 12 new exercises. Significant improvements are found in the chapters on conductor paths, membranes, strain gauges on membranes, capacitive forces, and pressure sensors. All exercises have been proven by feedback from students. Lecturers interested in using the book for teaching may write to the author ([email protected]) and ask for the solutions of the exercises. Exercises and their solutions are also available in German. To ease looking up specific topics, they are systematically arranged in chapters of this book and at the end of the book there are lists of all characteristic curves of sensors and actuators, and of tables with equations. As a consequence, teaching based on this book can become more interesting, and thus effective, if the sequence in which the subjects are taught partly differs from the book. For instance, feedback in the chapter on electrical measurements could be presented where it is first needed for an
