Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calcula
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Werner Karl Schomburg
Introduction to Microsystem Design
Prof. Dr. rer. nat. Werner Karl Schomburg RWTH Aachen University Konstruktion und Entwicklung von Mikrosystemen (KEmikro) Steinbachstraße 53 B 52074 Aachen Germany [email protected]
ISSN 1865-0899 e-ISSN 1865-0902 ISBN 978-3-642-19488-7 e-ISBN 978-3-642-19489-4 DOI 10.1007/978-3-642-19489-4 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2011928914 # Springer-Verlag Berlin Heidelberg 2011 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: deblik, Berlin, Germany Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
Microsystems technology (MST) or Microelectromechanical systems (MEMS) how it is called in America is a comparatively young emerging technology, which allows building up miniaturized devices such as microvalves for implantable medicament dosing systems or micro-total analysis systems (mTAS) which shall provide a miniaturized laboratory on a polymer chip just a few centimeters in size. The first steps to MST had been done more than 30 years ago when anisotropic etching of silicon was discovered [1] and sacrificial layer technique was invented [2]. Nowadays, MST is a well-established technology which is the basis of many products. Modern life in many fields is based on a variety of microsystems unnoticed by most of us. In most cars, microsensors for the measurement of acceleration, yaw rate, pressure, and flow are implemented. Watches, hearing aids, mobile phones, beamers, ink-jet printers, PCs, and catheters for minimal invasive surgery are other examples of applications which became possible in the present form by microtechnologies only. Accordingly, many jobs are available in microtechnique and much more jobs are depending on it. In previous decades, the fabrication techniques of MST had been the main issue of research and development resulting in today’s more or less standard production processes such as bulk silicon etching, reactive ion etching, surface micromachining, micromolding, silicon fusion bonding, etc. These processes are well described in several text books [3–6], and, therefore, are available for both industry and teaching
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