Investigation of cerium oxide thin film thickness using THz spectroscopy for non-destructive measurement
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RESEARCH ARTICLE
Investigation of cerium oxide thin film thickness using THz spectroscopy for non-destructive measurement Subhash Nimanpure1 • Guruvandra Singh1,2 • Sudha Yadav1,2 • Preetam Singh1,2 Girija Moona1 • Mukesh Jewariya1,2 • Rina Sharma1,2
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Received: 18 June 2020 / Accepted: 30 October 2020 Ó The Optical Society of India 2020
Abstract Through time of non-destructive measurement of individual layer of materials or paint layers at nano-scale, non-contact terahertz technique is a very good approach. In this research work, the cerium oxide (CeO2) thin film is deposited on sapphire (c-Al2O3) substrate having thickness of 430 lm by using RF magnetron sputtering technique. A terahertz pulses incident on the CeO2 film, layer of CeO2 interface with substrate. Some amount of incident pulse transmits and rest will reflect with respect to transmission mode and reflection mode, respectively. In the reflection mode, the time elapsed between the arrival and departure of cerium oxide layer is directly proportional to the thickness of the layer as a function of wavelength. The thickness of CeO2 is measured about 35.83 lm using terahertz spectroscopy. This study shows that terahertz spectroscopy is an experimental approach and possible to measure thickness of thin film for non-destructive measurement. Keywords CeO2 thin film THz spectroscopy Nondestructive measurement Thickness measurement
Introduction Non-destructive testing and measurements using contact free technique plays an important role specially for thickness measurement in aircraft and automobile industries for & Mukesh Jewariya [email protected] 1
CSIR-National Physical Laboratory, New Delhi 110012, India
2
Academy of Scientific and Innovative Research (AcSIR), Ghaziabad, Uttar Pradesh 201002, India
quality assurance and monitoring system [1–5]. Terahertz waves attract much interest in real-time process monitoring and quality control, especially for non-contact, non-destructive thickness sensing [6–8]. Terahertz radiation penetrates a wide variety of non-conductive materials, such as films deposited on soft surface, ceramics coating, surface coating on paper, wood, paint, glass-fiber, reinforced plastics, dielectric substrates, and coatings in automotive and aircraft industry. One of the promising industrial applications of terahertz technology is the vehicle paint quality control in the car and aviation industry. Recently several contact and non-contact techniques have been developed for thickness measurement such as magnetic gauges, eddy-current measurements, ultrasonic testing, thermography and tomography based on X-ray. In spite of various advantages with in exiting techniques, there are limitation due to either in terms of ionized radiation hazards within the human body, or contact media required causes human error. The other limitations are measurement speed and depth resolution. Many times, we faced variability in the application of multi-layered systems. Thus, the measurement technique employed for thickness measurements shoul
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