Large-Area Deposition of Carbon Nanotubes for Field Emission Displays
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LARGE-AREA DEPOSITION OF CARBON NANOTUBES FOR FIELD EMISSION DISPLAYS Young-Jun Park1,2, In-Taek Han1,3, Ha-Jin Kim1, Yun-Sung Woo1, Nae-Sung Lee4, Yong-Wan Jin1,5, Jae-Eun Jung1,5, Chong-Yun Park2, and Jong-Min Kim1 1
FED Project, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600,
Korea 2
Department of Vacuum Science of Technology, Sungkyunkwan University, Suwon, 440-746,
Korea 3
Department of Chemistry, Seoul National University, Seoul, 151-742, Korea
4
Department of Advanced Materials Engineering, Sejong University, Seoul, 143-747, Korea
5
Department of Materials Engineering, Sungkyunkwan University, Suwon, 440-746, Korea
ABSTRACT
A direct synthesis of carbon nanotubes (CNTs) on substrates by chemical vapor deposition (CVD) is one of highly probable routes to reach their application to field emission displays. Several stringent requirements are prerequisite for this purpose, including low temperature growth below 600°C to engage glass substrates and large area deposition for practical use. This study carried out synthesis of CNTs by thermal CVD on glass substrates at temperatures as low as 500~550°C. CNTs were grown by thermal decomposition of CO and H2 gases at an atmospheric pressure for different thickness of Invar (an Fe-Ni-Co alloy ) catalytic layers. The growth of CNTs was strongly correlated with preparation of catalytic layers. The diameters and heights of as-grown CNTs increased as the catalytic layers became thicker from 2nm to 30nm. Measurements of the field emission properties of CNTs showed that the threshold electric fields were lowered with increasing thickness of catalytic layers. A uniform electron emission was observed over a large area of 150 × 150mm2, with high emission currents and high brightness.
INTRODUCTION
Since the discovery of carbon nanotubes (CNTs) by Iijima in 1991[1], CNTs have attracted considerable interest because of their unique physical properties and many potential applications[2]. CNTs have numerous potential applications in nanoelectronics, nanoscale Z6.8.1
structural materials, hydrogen storage, field emission devices, etc[3-5]. Among these applications, CNTs seem to be very promising as electron emitters for field emission displays (FEDs). It has been found that the field emission occurs not only at the tube tips but also on the tube side surface[6], which shows that their small radii of curvature ranging from several nanometers to even several hundreds of nanometers can produce a geometrical enhancement factor large enough for field emission at low electric fields. In addition, high electrical conductivity is required for electron transfer through CNTs. Many methods have been employed to synthesize CNTs such as laser ablation, arc discharge, and chemical vapor deposition (CVD)[7-9]. It has been reported that FED prototypes using CNTs as electron emitters were fabricated by screen printing of CNT paste, resulting in randomly oriented CNT emitters[10,11]. CNTs synthesized by arc discharge were laboriously separated, purified, and cut int
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