Metallographic aspects of thick film technology
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" T h i c k film t e c h n o l o g y " t r a c e s its a n c e s t r y to t h r e e s o u r c e s : the p r e p a r a t i o n of d e c o r a t i v e c e r a m i c g l a z e s , the f a b r i c a t i o n of c e r a m i c - t o - m e t a l s e a l s , and the d e v e l o p m e n t of e v a p o r a t e d or s p u t t e r e d "thin f i l m s " for e l e c t r o n i c a p p l i c a t i o n s . Today, " t h i c k f i l m s " a r e often the most r e l i a b l e and a l s o the cheapest route for s a t i s f y i n g n u m e r o u s r e q u i r e m e n t s in the functional packaging of s e m i c o n d u c t o r d e v i c e s , and in r e l a t e d a r e a s in m i c r o e l e c t r o n i c s . The technology of thick film d e v e l o p m e n t s is h e a v i l y o r i e n t e d toward p r o b l e m s r e l a t e d to m u l t i p h a s e s t r u c t u r e s and to i n t e r f a c e s . T y p i c a l thick f i l m s a r e e s s e n t i a l l y g l a s s / m e t a l c o m p o s i t e s , s i m i l a r to the " c e r m e t s " which were so p o p u l a r about a decade ago in a t t e m p t s to develop s t r u c t u r a l m a t e r i a l s for high t e m p e r a t u r e s . M i c r o g r a p h s a n d e l e c t r o n m i c r o p r o b e t r a c i n g s will be shown to i l l u s t r a t e typical s t r u c t u r e s , and the d e f e c t s o c c u r r i n g in them. S o l d e r i n g , b r a z i n g , t h e r m o c o m p r e s sion bonding, u l t r a s o n i c bonding, e u t e c t i c die bonding, and s e v e r a l v a r i a t i o n s of these t e c h niques a r e used for a t t a c h i n g d e v i c e s a n d / o r input-output c o n n e c t i o n s to c e r a m i c s u b s t r a t e s via thick f i l m s . The i n t e r f a c e p r o b l e m s a s s o c i a t e d with the s e q u e n t i a l bonds g e n e r a t e d in such p r o c e s s e s a r e of g r e a t i n t e r e s t in the d e v e l o p m e n t of thick film c o m p o s i t i o n s . W H E N y o u r p r o g r a m c h a i r m a n , Dr. S e r a p h i m , asked me to give this p r e s e n t a t i o n , he s u g g e s t e d that I talk f i r s t on the g e n e r a l subject of thick film technology, and then about specific topics r e l e v a n t to the theme of " d e f e c t s in e l e c t r o n i c m a t e r i a l s " and of i n t e r e s t to an audience of m e t a l l u r g i s t s . Quite a few of you here a r e thoroughly f a m i l i a r with thick f i l m s a l r e a d y , and I will have to a s k you to be patient while I try to provide a g e n e r a l b a c k g r o u n d for some of the other p a p e r s to follow in this s e s s i o n . We tend to forget s o m e t i m e s that thick film technology has r e m a i n e d quite i s o l a t e d in the o v e r a l l s c i e n t i f i c and t e c h n i c a l s e n s e so far, even though it is b e g i n n i n g to be an i m p o r t a n t s e g m e n t of the e l e c t r o n i c s i n d u s t r y . H i s t o r i c a l l y , thick film technology has its r o o t s in the d e c o r a t i o n of c e r a m i c s and g l a
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