Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been syste

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Xiao-Sheng Zhang

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Springer Theses Recognizing Outstanding Ph.D. Research

Aims and Scope The series “Springer Theses” brings together a selection of the very best Ph.D. theses from around the world and across the physical sciences. Nominated and endorsed by two recognized specialists, each published volume has been selected for its scientific excellence and the high impact of its contents for the pertinent field of research. For greater accessibility to non-specialists, the published versions include an extended introduction, as well as a foreword by the student’s supervisor explaining the special relevance of the work for the field. As a whole, the series will provide a valuable resource both for newcomers to the research fields described, and for other scientists seeking detailed background information on special questions. Finally, it provides an accredited documentation of the valuable contributions made by today’s younger generation of scientists.

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Xiao-Sheng Zhang

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting Doctoral Thesis accepted by Peking University, Beijing, China

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Author Dr. Xiao-Sheng Zhang Institute of Microelectronics Peking University Beijing, China

Supervisor Prof. Hai-Xia Zhang Institute of Microelectronics Peking University Beijing China

and Microsystems Laboratory École Polytechnique Fédérale de Lausanne Lausanne Switzerland and Institute of Industrial Science The University of Tokyo Tokyo Japan

ISSN  2190-5053 ISSN  2190-5061  (electronic) Springer Theses ISBN 978-3-662-48814-0 ISBN 978-3-662-48816-4  (eBook) DOI 10.1007/978-3-662-48816-4 Library of Congress Control Number: 2015955387 Springer Heidelberg New York Dordrecht London © Springer-Verlag Berlin Heidelberg 2016 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations