Microfluidics and BioMEMS Applications
Microfluidics and BioMEMS Applications central idea is on microfluidics, a relatively new research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving flui
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MICROSYSTEMS Volume 10 Series Editor
Stephen D. Senturia Massachusetts Institute of Technology
Editorial Board Roger T. Howe, University of California, Berkeley D. Jed Harrison, University of Alberta Hiroyuki Fujita, University of Tokyo Jan-Ake Schweitz, Uppsala University
OTHER BOOKS IN THE SERIES: Methodology for the Modelling and Simulation of Microsystems Bartlomiej F. Romanowicz Hardbound, ISBN 0-7923-8306-0, October 1998
Microcantilevers for Atomic Force Microscope Data Storage Benjamin W. Chui Hardbound, ISBN 0-7923-8358, October 1998
Bringing Scanning Probe Microscopy Up to Speed Stephen C. Minne, Scott R. Manalis, Calvin F. Quate Hardbound, ISBN 0-7923-8466-0, February 1999
Micromachined Ultrasound-Based Proximity Sensors Mark R. Hornung, Oliver Brand Hardbound, ISBN 0-7923-8508-X, April 1999 Microfabrication in Tissue Engineering and Bioartificial Organs Sangeeta Bhatia Hardbound, ISBN 0-7923-8566-7, August 1999
Microscale Heat Conduction in Integrated Circuits and Their Constituent Films Y. Sungtaek Ju, Kenneth E. Goodson Hardbound, ISBN 0-7923-8591-8, August 1999
Scanning Probe Lithography
Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate Hardbound, ISBN 0-7923-7361-8, June 2001
Optical MicroScanners and Microspectrometers using Thermal Bimoph Actuators Gerhard Lommel, Sandra Schweizer, Philippe Renaud Hardbound, ISBN 0-7923-7655-2, January 2002
Microfluidics and BioMEMS Applications edited by
Francis E.H. Tay The National University of Singapore
SPRINGER-SCIENCE+BUSINESS MEDIA B.V.
A C.l.P. Catalogue record for this book is available from the Library of Congress.
ISBN 978-1-4419-5316-2 ISBN 978-1-4757-3534-5 (eBook) DOI 10.1007/978-1-4757-3534-5
Printed on acid-free paper
AII Rights Reserved
© 2002 Springer Science+Business Media Dordrecht Originally published by Kluwer Academic Publishers in 2002 Softcover reprint ofthe hardcover lst edition 2002 No part of this work may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, microfilming, recording or otherwise, without written permission from the Publisher, with the exception of any material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work.
TABLE OF CONTENTS
Table of Contents........................................................................... v List of Contributors...................................................................... ix Foreword ....................................................................................... xi Preface ......................................................................................... xiii Acknowledgements ..................................................................... xxi
PART I ............................................................................... ! Chapter 1 Literature Review for Micropumps ••••••.•••••••••.••••••••. 3 1.1 Origins of Micropump Research .......................................
