MOCVD of Nb Substituted SrBi 2 Ta 2 O 9 for Integrated Ferroelectric Capacitors

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Mat. Res. Soc. Symp. Proc. Vol. 596 © 2000 Materials Research Society

no apparent fatigue to 1010 cycles [5]. Results with solution deposited films indicate that moderate substitution of Nb substitution (0.2

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