Nanoliquid Processes for Electronic Devices Developments of Inorgani
This book summarizes the results of the research on how to make small electronic devices with high properties by using simple liquid processes such as coating, self-assembling and printing, especially focusing on devices composed of silicon and oxide mate
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Nanoliquid Processes for Electronic Devices Developments of Inorganic Functional Liquid Materials and Their Processing
Nanoliquid Processes for Electronic Devices
Tatsuya Shimoda
Nanoliquid Processes for Electronic Devices Developments of Inorganic Functional Liquid Materials and Their Processing
Tatsuya Shimoda Japan Advanced Institute of Science and Technology Nomi, Ishikawa, Japan
ISBN 978-981-13-2952-4 ISBN 978-981-13-2953-1 (eBook) https://doi.org/10.1007/978-981-13-2953-1 Library of Congress Control Number: 2018959442 © Springer Nature Singapore Pte Ltd. 2019 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors, and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. This Springer imprint is published by the registered company Springer Nature Singapore Pte Ltd. The registered company address is: 152 Beach Road, #21-01/04 Gateway East, Singapore 189721, Singapore
Preface
This book summarizes the research outcomes of the “ERATO Shimoda nano liquid process project” and its extended research, both of which aimed to fabricate nano- sized devices directly through creating a novel printing technology. The project was sponsored by the Japan Science and Technology Agency. Because the outcomes were produced by many researchers involved, I have used “we” instead of “I” in the descriptions of the research-related contents. The researchers who led each research project can be found in the corresponding literatures. In the project, Si-based and oxide-based transistors were selected as target nanosized devices. The first work in the project was the development of a series of solution materials together with their proper processes to realize solid films with high performance, followed by research works to create a direct printing method using the developed solutions and to fabricate devices using it. In the case of fabricating a Si-based transistor, i.e., a metal-oxide semiconductor field-effect transistor (MOSFET),
