Nanotribological and nanomechanical properties of plasma-polymerized polyterpenol thin films
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Organic plasma polymers are currently attracting significant interest for their potential in the areas of flexible optoelectronics and biotechnology. Thin films of plasma-polymerized polyterpenol fabricated under varied deposition conditions were studied using nanoindentation and nanoscratch analyses. Coatings fabricated at higher deposition power were characterized by improved hardness, from 0.33 GPa for 10 W to 0.51 GPa for 100 W at 500-lN load, and enhanced wear resistance. The elastic recovery was estimated to be between 0.1 and 0.14. Coatings deposited at higher RF powers also showed less mechanical deformation and improved quality of adhesion. The average (Ra) and root mean square (Rq) surface roughness parameters decreased, from 0.44 nm and 0.56 nm for 10 W to 0.33 nm and 0.42 nm for 100 W, respectively.
I. INTRODUCTION
Polymer thin films fabricated using low-temperature nonequilibrium plasma techniques are actively studied for their physical and chemical stability and low cost, uncomplicated production.1 From one precursor, polymers of significantly different chemical and physical structures or films with property gradient can be obtained by controlling deposition conditions of polymerization. Such conditions include the energy delivered into the reaction chamber, monomer flow, geometry of the reactor, addition of gas, and so on.2 Furthermore, compounds not amenable to conventional thermochemical polymerization pathways can be polymerized using plasma techniques. Given their high adhesion to the substrate and smooth, defect-free, and uniform surfaces, plasma polymers have already found their application as antiscratch barriers and protective coatings. These include corrosion-protective barrier coatings on reflectors and metallic surfaces, coupling and corrosion prevention layers on steel, adhesion promotion pretreatments on aluminum, gas permeation barrier coatings in packaging, and resist in microfabrication processing.3 Organic plasma polymers are currently attracting significant interest for their potential in the areas of mechanics, flexible electronics, and optics. The ability to retain certain functionalities of the organic precursor in the polymer film also renders these materials attractive to the field of biotechnology. Here, organic plasma polymers can take role of biomaterials, tissue scaffolds, hydrophobic antifouling coatings, and as antireflective coatings on polymeric ophthalmic lenses. a)
Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/jmr.2011.349 2952
J. Mater. Res., Vol. 26, No. 23, Dec 14, 2011
http://journals.cambridge.org
Downloaded: 01 Mar 2015
Whether within an electronic device or as a bioactive coating, the mechanical and morphological properties of these films influence the nature of application, performance, and longevity of these materials. Furthermore, the morphology of the surface is known to influence the wetting behavior of the solid films, the latter being an important consideration with regard to biomedical prospect of these materials. Hence, to
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