Advanced Mechatronics and MEMS Devices II
This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-da
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Dan Zhang Bin Wei Editors
Advanced Mechatronics and MEMS Devices II
Microsystems and Nanosystems Series editors Roger T. Howe, Stanford, CA, USA Antonio J. Ricco, Moffett Field, CA, USA
More information about this series at http://www.springer.com/series/11483
Dan Zhang • Bin Wei Editors
Advanced Mechatronics and MEMS Devices II
123
Editors Dan Zhang York University Toronto, ON, Canada
ISSN 2198-0063 Microsystems and Nanosystems ISBN 978-3-319-32178-3 DOI 10.1007/978-3-319-32180-6
Bin Wei University of Ontario Institute of Technology Oshawa, ON, Canada
ISSN 2198-0071 (electronic) ISBN 978-3-319-32180-6 (eBook)
Library of Congress Control Number: 2012943040 © Springer International Publishing Switzerland 2017 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer International Publishing AG Switzerland
Preface
Mechatronics and robotics have been widely used in many arenas, such as manufacturing, medical, and space. With the rapid development of mechatronics and MEMS technologies, a follow-up edition of the book Advanced Mechatronics and MEMS Devices is deemed necessary. The aim of Advanced Mechatronics and MEMS Devices II is to introduce the state-of-the-art technologies in the field of mechatronics, robotics, and MEMS devices in order to further summarize and improve the methodologies of mechatronics and MEMS devices. Advances made in the past decades will be well described in this book, including mechatronics, robotics, and MEMS-related issues. We would like to express our deep appreciation to all the authors for their significant contributions to the book. Their commitment, enthusiasm, and technical expertise are what made this book possible. We are also grateful to the publisher for supporting this project and would especially like to thank Marta Moldvai of Springer Science Business Media (USA) for her constructive assistance and cooperation, both
