Control and Optimization of Multiscale Process Systems
Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufactur
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Editorial Advisory Board Okko Bosgra Delft University The Netherlands
William Powers Ford Motor Company (retired) USA
Graham Goodwin University of Newcastle Australia
Mark Spong University of Illinois Urbana-Champaign USA
Petar Kokotovi´c University of California Santa Barbara USA Manfred Morari ETH Zürich Switzerland
Iori Hashimoto Kyoto University Kyoto Japan
Panagiotis D. Christofides, Antonios Armaou Yiming Lou Amit Varshney
Control and Optimization of Multiscale Process Systems
Birkhäuser Boston • Basel • Berlin
Panagiotis D. Christofides University of California, Los Angeles Department of Chemical & Biomolecular Engineering Los Angeles USA [email protected]
Antonios Armaou Pennsylvania State University Department of Chemical Engineering University Park USA [email protected]
Yiming Lou United Technologies Corporation Pomona, CA USA [email protected]
Amit Varshney Westminster, CO USA [email protected]
ISBN: 978-0-8176-4792-6 DOI 10.1007/978-0-8176-4793-3
e-ISBN: 978-0-8176-4793-3
Library of Congress Control Number: 2008939376 © Birkhäuser Boston, a part of Springer Science+Business Media, LLC 2009
All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Birkhäuser Boston, c/o Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper birkhauser.com
Contents
List of Figures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ix
List of Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xvii Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xix 1
2
3
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.1 Motivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.2 An Example of a Multiscale Process: Thin-Film Growth . . . . . . . . . . 1.3 Background on Control and Optimization of Multiscale Process Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.4 Objectives and Organization of the Book . . . . . . . . . . . . . . . . . . . . . . .
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Multiscale Process Modeling and Simulation . . . . . . . . . . . . . . . . . . . . . . 2.1 Overview of Multiscale Modeling . . . . . . . . . . . . . . . . . . . . . . . .
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