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DEFECT REDUCTION OF CVD-GROWN CUBIC SiC EPITAXIAL FILMS ON OFF-AXIS Si(100) SUBSTRATES WITH A NOVEL OFF-DIRECTION. KATSUKI FURUKAWA, NAKAJIMA Central Research Development Group, Nara 632, Japan.

YOSHIHISA

FUJII,

AKIRA

SUZUKI,

AND

SHIGEO

Laboratories, Corporate Research and Sharp Corporation, 2613-1 Ichinomoto, Tenri,

ABSTRACT Monocrystalline cubic SiC (j6 -SiC) thin films with lower defect densities have been epitaxially grown by chemical vapor deposition on off-axis Si (100) substrates with off-directions different from the conventional

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