Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity
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TECHNICAL PAPER
Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity Jun Feng1,2
•
Weiping Zhang1
•
Liutao Gu1,2 • Zhaoyang Liu1,2
Received: 11 August 2020 / Accepted: 23 September 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract The mechanical sensitivity (Smech ) is an important performance for ring-like disk resonator gyroscope (RDRG). To provide guidelines for improving Smech , the reliable expression of Smech is derived by taking into account frequency split and difference of effective mass. The design strategy indicates the main way to improve Smech is reducing effective stiffness and frequency split. Then a novel gear-like disk resonator gyroscope (GDRG) is designed by replacing circular rings of RDRG with meander-shaped rings consisting of linear beams. Afterwards, the characteristics between RDRG and GDRG are compared. For gyroscopes fabricated ideally, GDRG has a decrease of 58.40% on effective stiffness, an increase of 49.51% on quality factor (Q) and an increase of 694.28% on Smech , comparing with RDRG. For actual fabricated gyroscopes, GDRG has much less frequency split than RDRG due to its much higher immunity to crystal orientation error and fabrication errors. Affected by these errors, effective stiffness and Q have small deviations from the values of gyroscopes fabricated ideally, Smech decreases greatly and Smech of GDRG is always much higher than that of RDRG. These results have verified GDRG can achieve high Smech due to its small effective stiffness, small frequency split and high Q. The ideas and methods described in this paper can also be applied to other similar gyroscopes.
1 Introduction In recent years, disk resonator gyroscopes (DRGs) especially ring-like disk resonator gyroscopes (RDRGs) have become attractive candidates among micro-electro-mechanical systems (MEMS) resonant gyroscopes due to their high performances (Challoner et al. 2014; Nitzan et al. 2013). The mechanical sensitivity (Smech ), which is defined as the ratio between the amplitude of sense mode and the input angular velocity, is a key parameter that should be improved to prevent the weak signal of microscale gyroscope from being submerged by noise (Li et al. 2019; Zhou et al. 2016a; Qin et al. 2019). To provide guidelines for improving Smech , the expression of Smech should be obtained. Its expression without frequency split has been
& Weiping Zhang [email protected] 1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
2
Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
shown in some researches (Zhou et al. 2016a; Xiao et al. 2016), which is not reliable for an actual gyroscope because the frequency mismatch cannot be avoided owing to some errors during micro-fabrication process. There are also some studies show the expres
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