Development of combinatorial PLD-STM system for the quick nano-fabrication and evaluation
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Development of combinatorial PLD-STM system for the quick nano-fabrication and evaluation Y. Matsumoto1, T. Ohsawa2, R. Takahashi2 and H.Koinuma1, 2, 3 1 Materials and Structures Laboratory, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8503, Japan 2 Frontier Collaborative Research Center Laboratory, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama 226-8503, Japan 3 JST and COMET ABSTRACT A combinatorial PLD-STM system has been developed for quick nano-fabrication and evaluation of epitaxial thin films and catalysts. Through a gate valve, a combinatorial nano-materials library fabricated in a PLD chamber can be transferred to a surface analysis chamber equipped with LEED and STM. The LEED pattern and atomically resolved STM image for systematically varied samples in the library are measured by locating one sample to another at the electron beam and STM probe position. In this way, we have quickly elucidated the initial growth process of SrO on SrTiO3(001) as well as surface structures of transition metal deposited TiO2 anatase. The combinatorial PLD-STM system has been verified to be very efficient technique for the exploration and optimization of nano-materials. INTRODUCTION There has been a growing interest in nano-science and/or -technology that has much to do with atomically controlled epitaxy and nano-fabrication of materials. The nano-scale down sizing technology enables us to realize the ultimate integrated electronic circuits for the future electronics. Furthermore, we can expect unusual physical and chemical properties that have not been observed in bulk samples, in the nano-sized materials due to the quantum and surface/interface effects. From this point of view, nano-material is new category of materials to be explored for new functions. On the other hand, in order to evade a laborious and time consuming process for the optimization of material properties, combinatorial chemistry has been primarily developed in the field of new drug synthesis [1]. Resulting remarkable efficiency has already had its most profound impact in the field of organic and bio-organic synthesis. Hence it is now being effectively extended to the development of new functional inorganic bulk and thin film materials, expecting the same benefit from the application of combinatorial chemistry in materials science as well [2,3]. Especially, the combinatorial thin film technology with pulsed laser deposition (PLD) developed recently [4,5] is easily applicable to the exploration and optimization of new nano-materials by combining with appropriate surface characterization techniques. For example, a scanning tunneling microscope (STM) is one of the powerful tools for the evaluation of each structure and property in the nano-materials library. In this paper, we report on the development of a combinatorial PLD-STM system for in-situ surface analysis with low energy electron diffraction (LEED) and STM of combinatorial fabricated thin film library, as well as on some preliminary results to demonstrate
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