Electrical and chemical properties of XeCl*(308 nm) exciplex lamp created by a dielectric barrier discharge
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Electrical and Chemical Properties of XeCl*(308 nm) Exciplex Lamp Created by a Dielectric Barrier Discharge1 S. Baadj, Z. Harrache, and A. Belasri Laboratoire de Physique des Plasmas, Matériaux Conducteurs et leurs Application (LPPMCA), Université des Sciences et de la Technologie d’Oran, USTOMB, Algérie email: [email protected] Received March 6, 2013; in final form, June 6, 2013
Abstract—The aim of this work is to highlight, through numerical modeling, the chemical and the electrical characteristics of xenon chloride mixture in XeCl* (308 nm) excimer lamp created by a dielectric barrier dis charge. A temporal model, based on the Xe/Cl2 mixture chemistry, the circuit and the Boltzmann equations, is constructed. The effects of operating voltage, Cl2 percentage in the Xe/Cl2 gas mixture, dielectric capaci tance, as well as gas pressure on the 308nm photon generation, under typical experimental operating condi tions, have been investigated and discussed. The importance of charged and excited species, including the major electronic and ionic processes, is also demonstrated. The present calculations show clearly that the model predicts the optimal operating conditions and describes the electrical and chemical properties of the XeCl* exciplex lamp. DOI: 10.1134/S1063780X13120015 1
1. INTRODUCTION
sure when UV radiation output is in its maximum depends on discharge geometry and voltage waveform.
Nonequilibrium plasma created by dielectric bar rier discharge (DBD) is one of the widely used as ultraviolet and vacuum ultraviolet (UV/VUV) sources in excimer lamps [1–8]. These lamps are used espe cially in biological sterilization, lithography, material deposition in microelectronics, plasma display panels, destruction of pollutants and lighting [9–17]. Recent theoretical and experimental investigations showed that pulse excited DBD is much efficient as UV sources, with typical gas pressure changing between 50 and 700 Torr. The optimum content of chlorine in Xe/Cl 2 gas mixtures is about 0.5–5% and the applied voltage is approximately several tens of kV [18, 19]. The presence of a dielectric between the electrodes prevents the transition to an arc [20, 21]. The materials widely used as dielectric barrier are glass, quartz, alu mina, and some special ceramics or polymers. More over, in order to optimize the discharge luminance efficiency, many experimental and theoretical simula tion studies of the plasma kinetics in pulseexcited DBDs have been realized in the last decade [22–36]. It has been shown that the efficiency is rather high and can reach 60% by employing a short pulsed voltage excitation [25, 26, 37–41]. As illustrated in [18], the optimization of the intensities of radiation depends not only on the gas composition but also on the gas pressure, the applied voltage and the number of pulses. In other works, as shown in [19], the optimum pres 1 The article is published in the original.
The aim of this work is to investigate the electrical and chemical characteristics of XeCl*(308
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