GaAs Devices and Circuits
GaAs devices and integrated circuits have emerged as leading contenders for ultra-high-speed applications. This book is intended to be a reference for a rapidly growing GaAs community of researchers and graduate students. It was written over several years
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MICRODEVICES Physics and Fabrication Technologies Series Editors: Ivor Brodie and Julius J. Muray SRI International Menlo Park, Calijornia
GaAs DEVICES AND CIRCUITS Michael Shur SEMICONDUCTOR LITHOGRAPHY Principles, Practices, and Materials Wayne M. Moreau
A Continuation Order Plan is available for this series. A continuation order will bring delivery of each new volume immediately upon publication. Volumes are billed only upon actual shipment. For further information please contact the publisher.
GaAs DEVICES AND CIRCUITS Michael Shur
University 0/ Minnesota Minneapolis, Minnesota
Springer Science+Business Media, LLC
Library of Congress Cataloging in Publication Data Shur, Michael. GaAs devices and circuits. (Microdevices: physics and fabrication technologies) Includes bibliographical references and index. 1. Gallium arsenide seipiconductors. I. Title. 11. Series: Microdevices. 621.3815'2 TK7871.15.G3S55 1986
86-25323
ISBN 978-1-4899-1991-5 ISBN 978-1-4899-1989-2 (eBook) DOI 10.1007/978-1-4899-1989-2 First Printing - August 1987 Second Printing-September 1988 Third Printing-July 1989
© 1987 Springer Science+Business Media New York Originally published by Plenum Press, New York in 1987. Softcover reprint ofthe hardcover 1st edition 1987 All rights reserved No part of this book may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, microfilming, recording, or otherwise, without written permission from the Publisher
To the memory of my father, Saul Shur
Preface GaAs devices and integrated circuits have emerged as leading contenders for ultra-high-speed applications. This book is intended to be a reference for a rapidly growing GaAs community of researchers and graduate students. It was written over several years and parts of it were used for courses on GaAs devices and integrated circuits and on heterojunction GaAs devices developed and taught at the University of Minnesota. Many people helped me in writing this book. I would like to express my deep gratitude to Professor Lester Eastman of Cornell University, whose ideas and thoughts inspired me and helped to determine the direction of my research work for many years. I also benefited from numerous discussions with his students and associates and from the very atmosphere of the pursuit of excellence which exists in his group. I would like to thank my former and present co-workers and colleagues-Drs. Levinstein and Gelmont of the A. F. Ioffe Institute of Physics and Technology, Professor Melvin Shaw of Wayne State University, Dr. Kastalsky of Bell Communications, Professor Gary Robinson of Colorado State University, Professor Tony Valois, and Dr. Tim Drummond of Sandia Labs-for their contributions to our joint research and for valuable discussions. My special thanks to Professor Morko.;, for his help, his ideas, and the example set by his pioneering work.
Since 1978 I have been working with engineers from Honeywell, Inc.-Drs. Nick Cirillo, Max Helix, Steve Jamison, Andy Peczal
