In Situ XPS Study of Interaction of Thin IVA, VA Metal Films with Native Oxide on Si Substrates

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and V films deposition on silicon with native oxide layer, and simultaneous appearance of the clean silicon surface regions. EXPERIMENT N-type (100) and (11) Si substrates were cleaned chemically in air by a standard procedure, including an etching step in a buffered HF solution and stored in air. The thickness of the formed native oxide films is