Interface modifications for improving the adhesion of a -C:H films to metals
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bulk polyimide was found. The oxygen Auger signal intensity steadily followed that of copper throughout the profile indicating homogeneous Cu and O throughout the surface layer. Two peaks are observed in the XPS oxygen Is spectrum. One is characteristic of the carbonyl and ether oxygens found in the polymer backbone, while the other peak at lower binding energy is suggestive of an oxide oxygen. The almost 1:1 nature of Cu:O obtained from atomic concentration determination via XPS implies CuO to be present at the surface. The CuO formation would also account for the satellite structure observed in the Cu(2p) band. Finally, the absence of a polymer overlayer in the 2X case was shown by transmission electron microscopy of film cross sections. A two-layered structure is observed in agreement with that predicted by Auger depth profiling. Thickness of the CuO deposit is on the order of 300 A (Fig. 4).
ACKNOWLEDGMENT The authors gratefully acknowledge the financial support of the National Aeronautics and Space Administration. REFERENCES 'Metal-Filled Polymers Properties and Applications, edited by S. K. Bhattacharya (Dekker, New York, 1986). 2R. J. Angelo and E. I. DuPont DeNemours and Co., U. S. Patent No. 3,073,785(1959). 3 S. A. Ezzell, T. A. Furtsch, E. Khor, and L. T. Taylor, J. Polym. Sci. Polym. Chem. Ed. 21, 865 (1983). 4 R. K. Boggess and L. T. Taylor, J. Polym. Sci. Polym. Chem. Ed. 25, 685 (1987). 5 J. D. Rancourt, R. K. Boggess, L. S. Horning, and L. T. Taylor, J. Electrochem. Soc. 134, 85 (1987). 6 D. G. Madeleine, S. A. Spillane, and L. T. Taylor, J. Vac. Sci. Technol. A 5, 347 (1987).
Interface modifications for improving the adhesion of a-C:H films to metals A. Grill,3' B. Meyerson,andV. Patel IBM T. J. Watson Research Center, Yorktown Heights, New York 10598 (Received 11 September 1987; accepted 30October 1987) The adhesion of diamondlike hard carbon films to silicide forming metals was improved by using an interfacial silicon film several atomic layers thick. The use of thicker ( > 10 nm) silicon layers results in a decrease in the adhesion, probably due to a degradation of the structural integrity by excessive silicide formation.
Diamondlike carbon (DLC) films are characterized by extreme hardness, chemical inertness to both acids and alkalis, high electrical resistivity, and optical transparency over a wide spectral range.1"6 The high hardness and chemical resistance of these films makes them good candidates as wear-resistant protective coatings for metals, optical, or electronic components. For some applications, such as magnetic recording media, where the protective film is desired to be less than 50 nm thick, the use of DLC is especially attractive. 214
J. Mater. Res. 3 (2), Mar/Apr 1988
http://journals.cambridge.org
The DLC films, which are essentially amorphous carbon containing up to 50% hydrogen,7 are typically found to have high internal stresses (10'° dyn/cm 2 ). In order to perform their protective role, the films have to adhere very well to the substrates, the adhesive forces having to
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