Magnetostrictive Microcantilever as Micro-Biosensor Platform
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Magnetostrictive Microcantilever as Micro-Biosensor Platform Suiqiong Li, Zhimin Li, Lisa Orona and Z.-Y. Cheng Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A. ABSTRACT In this paper, a novel micro-biosensor platform – magnetostrictive microcantilever (MSMC) – is reported. The resonance behavior and the sensitivity of MSMC as sensor platform were characterized and compared to the theoretical calculation. The detection of yeast cells using the biosensor made of MSMC was reported. The results demonstrate the feasibility of MSMC as a high performance biosensor platform. Compare to current microcantilevers, which is widely considered as the state-of-art sensor platform, the MSMCs have following advantages: 1) remote/wireless driving and sensing; 2) easy to fabricate. More importantly, it is experimentally found that the quality merit factor (Q value) of MSMC can reach more than 250, which is much higher than other cantilevers. INTRODUCTION There is an urgent need for biosensors working well in liquid with high sensitivity. Acoustic wave (AW) devices, such as quartz microbalance (QMC), surface-acoustic-wave (SAW) device, and flexural-plate-wave (FPW) device, have been widely investigated as biosensor platforms since the AW devices offer a real-time detection and high sensitivity. In last decade, MEMSbased Microcantilevers (MCs) as sensor platform attract a great deal of attention for developing high performance biosensors [1-4]. The MC is an AW device. Therefore, the MC inherits all the advantages of AW device. Meanwhile, MCs offer some unique advantages over other AW devices, such as compact size, easy integration with analysis circuit, low cost, and more importantly, much higher sensitivity. For example, B. Ilic, et.al, demonstrated that silicon-based MCs in length about 20 µm is capable to detect a single E.coli bacterium [5], and that the nanometer-scale MC of 6 µm x 0.5 µm x 160 nm in size is capable to detect a mass in attogram (10-18) [6]. The principle of all AW devices used as biosensor platforms is the same. That is, the resonance frequency of AW device changes with the mass load. Therefore, by monitoring resonance frequency, the mass load on the AW device can be detected and/or quantified. As a biosensor, AW device is immobilized with a bioreceptor, such as antibody and phage, onto its surface. The capture of target species by the bioreceptor results in a change in the mass load of the AW device. Therefore, by using different bioreceptor, the same AW device can be used to develop the biosensors for detecting different targets. That is, the AW devices used as biosensor platform are actually mass sensors. At present, most efforts focus on the study of silicon-based and piezoelectric-based MCs. In this paper, we report a novel type of MCs as sensor platform for developing high performance biosensors. The novel MC is based on magnetostriction rather than piezoelectricity – magnetostrictive-based microcantilever (MSMC). The MSMCs inherit all the advantages of MCs. Due to
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