Role of rapid photothermal processing in environmentally conscious semiconductor manufacturing
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Role of rapid photothermal processing in environmentally conscious semiconductor manufacturing R. Sharangpania) Department of Electrical and Computer Engineering, Clemson University, Clemson, South Carolina 29634-0915
R. Singh Department of Electrical and Computer Engineering and Materials Science and Engineering Program, Clemson University, Clemson, South Carolina 29634-0915 (Received 15 January 1997; accepted 7 July 1997)
Compliance with the increasingly stringent environmental laws will force the phasing out of conventional methods for the manufacture of all semiconductor devices. Development of processes with the highest possible material and energy efficiencies is the heart of the present ecological preservation efforts. Besides other benefits, rapid isothermal processing (RIP) also uses less energy than furnace processing. Further increase of material and energy efficiencies is possible by using rapid photothermal processing. Central to this method is the use of quantum photoeffects in conventional RIP systems. This approach can be consolidated with advanced chemical vapor deposition methods that further lower the wastages leading to systems that can give significant improvements over those presently used. Key experimental results and possible future directions are presented.
I. INTRODUCTION
Increasing pollution in the last few years has led to a buildup of greenhouse gases and is almost solely responsible for global warming. From 1990 to 1992, greenhouse gas emission from humans rose by 0.6% in just two years.1 The release of toxic chemicals and other hazardous material without proper pretreatment is also on the rise. If left uncontrolled, these effects can have catastrophic consequences. From the standpoint of electronics manufacturing, the semiconductor industry is considered relatively clean.2 In 1991, all of the electronics and electrical machinery contributed only 4% of the total hazardous chemicals generated.3 The semiconductor industry accounts for only 1% (by weight) of the total release of ozone depleting substances into the atmosphere.4 In fact, electronics contributes greatly to preserving the environment. Millions of trees have been saved by the use of electronic mail.5 The global information age that has largely been brought about due to effective electronic communication has saved millions of travel miles, and consequently, reduced air pollution. This, however, does not exempt the industry from legislations, mandates, and global regulations, because these laws are enacted to eliminate all sources of hazards, regardless of their source. In addition, the expected rise in the quantity of semiconductor based products will drastically increase the amount of toxic materials used a)
Present address: AG Associates, San Jose, California 95134-2300. J. Mater. Res., Vol. 13, No. 1, Jan 1998
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