Room temperature ammonia gas sensor based on V 2 O 5 nanoplatelets/Quartz crystal microbalance
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Room temperature ammonia gas sensor based on V2O5 nanoplatelets/ Quartz crystal microbalance Malika Berouaken1 · Lamia Talbi1 · Chafiaa. Yaddadene1 · Mohamed. Maoudj1 · Hamid Menari1 · Rezak Alkama2 · Noureddine Gabouze1 Received: 17 September 2020 / Accepted: 3 November 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract In the present work, we report the deposition of vanadium pentoxide (V2O5) thin film on the quartz crystal microbalance (QCM) using vacuum thermal evaporation method followed by rapid thermal annealing (RTA) in oxygen atmosphere (O2),for gas sensing application. The structure, morphology and surface wettability of the obtained thin film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and contact angle measurement (CA). The results show that the elaborated structure has a porous, rough and hydrophilic characteristic with a pure V2O5 phase in form of nanopaltelets. The sensing properties of V2O5 nanopaltelets /QCM structure were evaluated towards NH3 vapor at room temperature. The result revealed that the sensor exhibited good sensing performance: a fast response time, a short recovery time, good stability, reproducibility, reversibility and linearity. Keywords Vanadium oxide · Thin films · Quartz crystal microbalance · Gas sensor · NH3
1 Introduction Vanadium oxide has been widely studied because of it excellent properties such as electronic, optical, magnetic, chemical, thermal stability, electrochemical and structural properties which make it a promising material for several applications in catalysis [1, 2], cathodes for Li+ batteries [3–7], electrochromic devices [8–11], sensors [12–17] and solar cells [18, 19]. Vanadium oxides possesses different oxidation states such as VO, VO2, V2O3,V4O7, V4O9, V6O11, V6O13, V10O24, V2O5, etc. V2O5 is the most studied owing to its better stability. The different oxidation states can be obtained by making suitable modifications of the elaboration parameters. Such parameters may be the preparation technique, or/and the temperature. Several methods have been used to prepare vanadium oxide such as magnetron * Malika Berouaken [email protected]; [email protected] 1
Division Couches Minces Surfaces et Interfaces. 2, Centre de Recherche en Technologie des Semi-Conducteurs Pour l’Energétique, Bd Frantz Fanon, BP 140 Alger 7‑Merveilles, Algiers, Algeria
Laboratoire de Génie Electrique, Université Abderrahmane Mira Bejaia, 06000 Bejaïa, Algeria
2
sputtering [20], thermal evaporation [21], spray pyrolysis [22] and sol–gel [14]. Recently, QCM have attracted a great attention as mass sensitive transducer for the fabrication of gas sensors because of their high sensitivity, reproducibility, stability, linearity and low cost. These characteristics make QCM the ideal substrate for the manufacture of devices which allow the detection of gas and volatile organic compounds (VOCs) [23–30]. The operating principle of QCM sensors is to use the piezoel
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