Selective Depositions of Fe-Containing Oxide Films on Mixed Selfassembled Organic Monolayers using Microcontact Printing
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SELECTIVE DEPOSITIONS OF Fe-CONTAINING OXIDE FILMS ON MIXED SELFASSEMBLED ORGANIC MONOLAYERS USING MICROCONTACT PRINTING Hyunjung Shin*, Hyejin Im**, Seungbum Hong***, Kyongmi Lee*, Geunbae Lim*, Jong Up Jeon*, Eung Soo Kim**, and Y. Eugene Pak* *Micro Systems Lab., Samsung Advanced Institute of Technology and CRI, P.O. Box 111, Suwon, Korea 440-600 "**Department of Materials Engineering, Kyonggi University, Suwon, Korea ***Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, Korea ABSTRACT In situ patterning of crystalline iron oxide thin layers has been achieved via microcontact printing (gCP) and selective deposition. gICP was used to pattern two different surface moieties of selfassembled organic monolayers (SAMs) on Au/Cr/Si substrates. An elastomeric stamp (poly(dimethylsiloxane); PDMS) having a submicron-size patterned relief structure was used to transfer either hexadecanethiol (HDT) SAMs, which are to sustain deposition of iron oxide precipitates, or hydrophilic SAMs (e.g. dithiothreitol (DTT)). Selective deposition is realized through precipitation of iron oxide phases from aqueous solutions at ambient temperature (
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