• PDF / 1,604,463 Bytes
• 6 Pages / 420.48 x 639 pts Page_size
• 59 Downloads / 159 Views

DOWNLOAD

REPORT

SYNTHESIS AND PROPERTIES OF Mo/MoSix MICROLAMINATES USING ION BEAM ASSISTED DEPOSITION A. MASHAYEKHI,* L. PARFITT,* C. KALNAS,* J. W. JONES,* G. S. WAS * and D. W. HOFFMAN **

•

• The University of Michigan, Ann Arbor, MI 48109 Research Staff, Ford Motor Company, Dearborn, MI 48124

ABSTRACT Films of Mo, MoSix and Mo/MoSix (1.22

Recommend Documents

Ion-Beam-Assisted Deposition and Synthesis

222 99 4MB

Ion Beam Assisted Deposition

262 17 435KB

Synthesis of Hard Nitride Coatings by ion Beam Assisted Deposition

179 81 1MB

Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties

189 80 3MB

Ion Beam Assisted Deposition of Metal Films

273 43 1MB

Ion Beam assisted Deposition of Titanium Nitride

204 66 361KB

Microstructural evolution during ion beam assisted Deposition

207 81 2MB

Ion Beam Deposition, Film Modification and Synthesis

223 76 589KB

Thermal Annealing Investigation of the Optical Properties of Si 1-x N x Films Fabricated by Ion Beam Assisted Deposition

162 14 314KB

Characterization of TiN Films Prepared by Ion Beam Assisted Deposition

225 40 2MB

Residual Stress Control by Ion Beam Assisted Deposition

174 83 2MB

Ion Beam Deposition

209 85 10MB