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The Bio-Nano-Process: Making Semiconductor Devices Using Protein Supramolecules. Ichiro Yamashita 1,2,3 1 Advanced Technology Research Laboratories, Matsushita Electric Industrial. Co., Ltd., Hikaridai 3-4, Seika, Kyoto, 619-0237, Japan 2 CREST, Japan Science and Technology Agency, Honcho 4-1-8, Kawaguchi, Saitama 332-0012, Japan 3 Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0101, Japan ABSTRACT The biology and semiconductor technology have progressed independently. There was a large distance between them and a substantial interdisciplinary research area was left untouched. Recently, this situation is gradually changing. Some researchers are stimulating semiconductor technology by introducing bio-molecules into the nano-fabrication process. We proposed a new process for fabricating functional nano-structure on a solid surface using protein supramolecules, which we named “Bio Nano Process” (BNP). We employed a cage-shaped protein, apoferritin and synthesized several kinds of nanoparticles (NP) in the apoferritin cavity. A two-dimensional array of them was made on the silicon wafer and this array was heat treated or UV/ozone treated. These processes produced a two-dimensional inorganic NP array on the silicon surface. The size of the NP is small enough to be used as quantum dot and the floating nanodots memory using this NP array is now under development. We also proposed another application of the BNP, making use of the obtained nanodot array as the nanometric etching mask. This was realized by employing the neutral beam etching and 7nm Si nano columns with high aspect ratio were fabricated. These experimental results demonstrate that the BNP can fabricate the inorganic nanostructure using protein supramolecules and the BNP opened up a biological path to nanoelectronics devices.

INTRODUCTION The biology and semiconductor technology have made their progresses independently. They had little to share in the past days. The biology mainly handled wet samples in moderate circumstances but the semiconductor technology generally handled dry samples in the extreme conditions, such as in the high vacuum, high temperature, or organic solvent. There was big distance between them and a large interdisciplinary research area was left untouched. This situation is gradually changing these days. The biology researchers start using semiconductor technology to make many kinds of nanometer size apparatuses such as micro total analysis system µTAS) and biosensors. The semiconductor technology fabricates micro pumps, valves, mixer, grooves and, by reducing their sizes, biology researcher can perform the various analyses in much faster with much more precision. These are successful collaboration of semiconductor technology and biology, and there are more examples. In contract, the reverse case is rare. The nano-fabrication process using bio-molecules has been out of consideration, because bio-molecules are basically contamination for the semiconductor technology. Contamination ham