The Femtosecond Laser Ablation on Ultrafine-Grained Copper
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THE use of femtosecond lasers offers substantial advantages in the micro-nano processing field, enabling the application of high pulse energy densities and ultrashort pulse durations while avoiding conventional processing defects in the vicinity of the machining area.[1–3] Feng et al. examined the laser-induced ablation
JIANXUN LU is with the Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, Shenzhen University, Nan-hai Ave 3688, Shenzhen 518060, Guangdong, China and with the Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die, Shenzhen University, Nan-hai Ave 3688, Shenzhen 518060, Guangdong, China and also with the Shenzhen Technology University, Nan-hai Ave 3688, Pingshan District, Shenzhen, Guangdong, China. XIAOYU WU, DENGJI GUO, XIONG LIANG, and ZHAOZHI WU are with the Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, Shenzhen University and also with the Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die, Shenzhen University. Contact e-mails: [email protected]; [email protected] SHUANGCHEN RUAN and CHENLIN DU are with the Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, Shenzhen University. Contact e-mail: [email protected] Manuscript submitted October 16, 2017.
METALLURGICAL AND MATERIALS TRANSACTIONS A
and associated damage by means of scanning electron microscopy and transmission electron microscopy; no conventional processing defects were found.[3] As a result, better precision, higher resolution, and smaller feature size can be realized for the ablation of diverse materials. Femtosecond lasers, thus, have been applied in various fields, including electrical communication; information processing; industrial manufacturing; and medical, military, and scientific research. Micromachining by a femtosecond laser uses ablation to remove materials. To ablate material, the laser energy density must exceed a certain critical value, known as the ablation threshold.[4–6] Together with the laser system parameters, the optical properties (reflection and absorption coefficient) and thermodynamic properties (thermal diffusion coefficient) of materials can be used to determine the ablation threshold,[7] and researchers have investigated the ablation thresholds of diverse materials.[8–10] A femtosecond laser is focused on or near the sample surface to ablate material with a higher fluence than the ablation threshold. The processing methods used in micromachining include fixed-point ablation, linear ablation, and three-dimensional structure processing, which are used for punching, cutting, and processing of the microstructure, respectively. To determine the effect
of the laser pulse energy on the surface morphology of diverse materials, many studies have been performed on metals,[11–17] semiconductors,[18–20] and glasses.[21–26] Wu et al. observed the generation of subsurface voids and a nanocrystalline surface layer in femtosecond laser irradiation of a single-crystal Ag target.[11] Zayarny et a
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