Top-down and bottom-up nanofabrication for multipurpose applications
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0921-T03-06
Top-down and bottom-up nanofabrication for multipurpose applications. Enzo Di Fabrizio1, Filippo Romanato2,3, Stefano Cabrini2,4, Francesco Deangelis1, Arum Amy Yu5, Rober Barsotti5, Gioia Dealla Giustina6, Giovanna Brusatin6, and Fracesco Stellacci5 1 Campus Germaneto, University Of Magna Graecia, Viale Europa, Catanzaro, IT-88100, Italy 2 Lab. TASC, INFM-CNR, S.S. 14 km 163.5, Trieste, I-34012, Italy 3 MSE, Nanyang Technological University, Nanyang Ave., Singapore, 639798, Singapore 4 Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, MS 66, Berkeley, CA, 94720 5 DMSE, MIT, 77 Mass. Ave., Cambridge, MA, 02139 6 Dep. of Mechanical Engineering, University of Padova, via Marzolo 9, Padova, I-35131, Italy
ABSTRACT In this article we will show three recent examples of combined strategies aiming at merging topdown and bottom-up approach for nanofabrication at nanoscale level. The first example shows the fabrication of nanogaps performed by Focus Ion Beam technique that have been used to measure the conductivity of few gold nanoparticles aggregates deposited by Dip Pen lithography. The second example deals with the parallel replica of high resolution master generated by Electron Beam lithography by means of an innovative lithographic process based on DNA supramolecular nano-stamping. The latter example proposes the possibility to generate, through radiation exposure, direct patterning of hybrid sol gel material doped with fluorescent molecules. The outline of the fabrication approaches and their scientific and technical perspective are discussed. INTRODUCTION The combination of top-down and bottom-up approach for nanofabrication at nanoscale level is going to consolidate wide application possibilities. The use of different lithographic techniques exploiting different and synergic properties appears to be an effective strategy for the realization of new functionalities at nanoscale level. The scale reduction and the organization of matter at molecular level, is accelerating the effort of combining bottom up and top down experimental methods. The relevance of this investigation field is dictated by the necessity of making practical the fabrication of novel architectures necessary to fully understand and exploit the organization of matter at nanoscale level. In this work we will show three different hybrid approaches. In the first case we discuss the combination of Focus ion Beam (FIB) and Dip Pen for the deposition of Au nanoparticles between contacts with gap typically of 15nm. This is an example of a strategy for a reliable conductivity measurement of few nanoparticles aggregates. In recent years, a large number of devices based on organic and biological materials have been developed. The second examples deals with an innovative method for the parallel replica of high resolution master generated by Electron Beam lithography (EBL) with organic and biological materials. The method is based on DNA supramolecular nano-stamping and is devoted to scale up the production of these systems t
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