Two-layer vertical welding of glasses by femtosecond laser through galvo scanner
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RESEARCH ARTICLE
Two-layer vertical welding of glasses by femtosecond laser through galvo scanner Hua Tan1,2,3 • Yuxun Zhang1 • Yanxing Liu1 • Xiaoquan Fu1
Received: 29 February 2020 / Accepted: 13 July 2020 Ó The Optical Society of India 2020
Abstract We demonstrated two-layer vertical welding of fused silica by femtosecond laser through galvo scanner. Promising approaches to a well-known technique of glasses welding by femtosecond laser were presented, which provided us efficient ways to draw welding route without programming through galvo scanner, gravitational effects on the welding direction by vertical welding and realized two-layer welding at very short intervals to refine microstructure and increase bonding strength in bonding zone. Under the same parameters condition, we found that the maximum joining strength as large as 80.26 MPa could be obtained in two-layer vertical welding through galvo scanner, which exceeded quadruple of one-layer horizontal welding focused by objective lens. Compared with onelayer welding, more uniform and fine microstructure can be obtained in bonding region by two-layer welding. Keywords Femtosecond laser Two layers Glass welding Vertical welding Galvo scanner
& Hua Tan [email protected] 1
Dongguan University of Technology, Dongguan 523106, China
2
State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
3
College of Mechanical Engineering, Hunan Institute of Science and Technology, Yueyang 414000, China
Introduction The rapid development of glasses welding by femtosecond laser has revolutionized glass assembling and processing due to its unique characteristics of ultra-short pulse width and extremely high peak intensity. Potential applications for femtosecond laser trigger glasses welding are manifold in fields such as opto-fluidics, micro-fluidics, healthcare, precision machinery, small satellites and electromechanical, electronic devices, and so forth. Tamaki et al. [1] first proposed and demonstrated femtosecond laser welding of fused silica substrates without inserting an intermediate layer by using 1 kHz, 130-fspulse width and 800-nm laser pulses. And then, Watanabe et al. reported on femtosecond laser space-selective joining of dissimilar glass such as fused silica and borosilicate glass, considering the difference of coefficients of thermal expansion, by an amplified Ti sapphire laser system producing 85 fs, 800 nm and 1 kHz pulses followed later the same year [2]. Watanabe and Tamaki group continued to investigate the optimal condition for joining glass substrates using femtosecond lasers in 2007. They presented a systematic study on the laser parameters (such as translation velocity and laser energy) used for bonding borosilicate glass substrates and those for joining fused silica substrates using a 1 kHz and 800 nm Ti sapphire amplifier, and obtained bonding strength as large as 14.9 MPa in both fused silica and borosilicate glass [3]. After lo
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