3D Microstructuring of Silicate Glass by Femtosecond Laser Radiation
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CS OF LOW-DIMENSIONAL STRUCTURES, MESOSTRUCTURES, AND METAMATERIALS
3D Microstructuring of Silicate Glass by Femtosecond Laser Radiation A. E. Rupasova, *, P. A. Danilova, M. P. Smaeva, b, M. S. Kovalevc, **, A. S. Zolot’koa, A. A. Ionina, and S. I. Kudryashova, d a
Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 119991 Russia University of Chemical Technology of Russia, Moscow, 125047 Russia c Bauman Moscow State Technical University, Moscow, 105005 Russia d ITMO University, St. Petersburg, 197101 Russia *e-mail: [email protected] **e-mail: [email protected]
b Mendeleev
Received January 10, 2019; revised February 11, 2020; accepted February 28, 2020
Abstract—Silicon glass was microstructured by means of linear one-dimensional scanning of a tightly focused femtosecond laser beam with visible spectrum and different polarization in the bulk of the material. Optical microscopy revealed the formation of microstructures demonstrating enhanced extinction in the blue spectral range when the laser beam had linear or circular polarization. However, no birefringence was found in the microstructures. Keywords: direct laser writing, femtosecond laser pulses, bulk functional nano- and micro-optical metastructures, birefringence DOI: 10.1134/S0030400X20070188
INTRODUCTION Direct femtosecond writing in bulk dielectrics enables creating permanent local modifications that can be used in different applications, e.g., for creation of optical waveguides, power splitters, cavities in the bulk of active media, along with devices of micro- and nanofluidics. Various types of modifications and defects can be obtained by changing parameters of the radiation [1, 2]. There are several types of structures that can be written by femtosecond laser pulses: areas exhibiting refractive index different from that of the original material, birefringent structures, cavities, etc. The actively developing field of laser recording and long-term storage of information should be mentioned specially [3]. The method is based on creating a cavity in the bulk of the material the structure and optical properties of which depend on parameters of radiation used for material processing. Periodic nanogratings can be formed upon interaction of ultrashort laser pulses with bulk glass [4]. These structures represent parallel stripes the direction of which depends on laser-beam polarization. The period of self-organized nanogratings depends on pulse energy and the number of pulses incident on the same spot. Periodicity of the stripes varies within a few hundred nanometers, which is less that the wavelength
of the laser used to write them [5]. Properties of these structures can be used for fabrication of half-wave and quarter-wave plates, along with polarization converters, polarization-dependent devices, and retarders. Microstructures based on microlines in sapphire crystals [6] represent another type of structures exhibiting birefringence. In this case, birefringence appears due to mechanical stress in the region not exposed to laser processi
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