CMOS VLSI Engineering Silicon-on-Insulator (SOI)
Silicon-On-Insulator (SOI) CMOS technology has been regarded as another major technology for VLSI in addition to bulk CMOS technology. Owing to the buried oxide structure, SOI technology offers superior CMOS devices with higher speed, high density, and re
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CMOS VLSI ENGINEERING Silicon-on-Insulator (SOl)
by
JAMESB.KUO and
KER-WEI SU National Taiwan University
Springer-Science+Business Media, B.Y.
Library of Congress Cataloging-in-Publication Data
ISBN 978-1-4419-5057-4 ISBN 978-1-4757-2823-1 (eBook) DOI 10.1007/978-1-4757-2823-1
Printed on acid-free paper
All Rights Reserved
© 1998 Springer Science+Business Media Dordrecht Originally published by Kluwer Academic Publishers in 1998. Softcover reprint of the hardcover 1st edition 1998 No part of the material protected by this copyright notice may be reproduced or utilized in any fonn or by any means, electronic or mechanical, including photocopying, recording or by any infonnation storage and retrieval system, without written pennission from the copyright owner.
Acknow ledgements The authors would like to thanks colleagues in Taiwan and professors at Stanford for their support during the past 11 years. Without their encouragements, this work is not possible. The author would like to thank J. H. Lou, S. C. Lin, C. H. Hsu, C. K. Huang, C. Y. Huang, Y. M. Huang, J. Y. Lai, R. J. Liu, J. C. Su, H. K. Sui, and K. H. Yuan, for their help on drawing. The author would like to thank Ms. Cindy Lufting, Mr. James Finlay, and Mr. Mike Casey of Kluwer for their help such that this book could be published.
Preface Silicon-On-Insulator (SOl) CMOS VLSI technology has been regarded as another major technology for VLSI in addition to bulk CMOS technology. Owing to the buried oxide isolation structure, SOl technology offers superior CMOS devices with higher speed, higher density, and reduced second order effects for deep-submicron low-voltage, low-power VLSI circuit applications. In addition to VLSI applications, SOl technology has also been used to realize communication circuits, microwave devices, BiCMOS devices, and even fiber optics applications for its superior properties. There are three key factors in engineering SOl CMOS VLSI- processing technology, device modeling, and circuit designs. The mutual influences from three factors are important in developing a creative SOl CMOS VLSI technology. Improvements in the processing technology and understanding of the device behaviors lead to progresses in the SOl circuit designs. Requirements for low-voltage lowpower high-performance SOl circuits in the world-wide portable systems serve as an incentive to further evolve the SOl CMOS processing technology. Understanding of the SOl CMOS device behaviors can provide new ideas for development of the next-generation SOl CMOS technology. In addition, the developed SOl CMOS device models can provide CAD tools for circuit simulation. In this book, these three key factors in engineering SOl CMOS VLSI are covered. Starting from the SOl CMOS processing technology and the SOl CMOS digital and analog circuits, behaviors of the SOl CMOS devices are presented. In addition, a CAD program-STSPICE, which incorporates models for deep-submicron fully-depleted mesa-isolated SOl CMOS devices, is described. This book is written for undergraduate se