Lock-in Thermography Basics and Use for Evaluating Electronic Device
This book deals with lock-in thermography (LIT) as a special active dynamic variant of the well-known IR thermography. It enables a much improved signal-to-noise ratio (up to 1000x) and a far better lateral resolution compared to steady-state thermography
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advanced microelectronics
10
Springer Series in
advanced microelectronics Series Editors: K. Itoh T. Lee T. Sakurai W.M.C. Sansen D. Schmitt-Landsiedel The Springer Series in Advanced Microelectronics provides systematic information on all the topics relevant for the design, processing, and manufacturing of microelectronic devices. The books, each prepared by leading researchers or engineers in their f ields, cover the basic and advanced aspects of topics such as wafer processing, materials, device design, device technologies, circuit design, VLSI implementation, and subsystem technology. The series forms a bridge between physics and engineering and the volumes will appeal to practicing engineers as well as research scientists.
Please view available titles in Springer Series in Advanced Microelectronics on series homepage http://www.springer.com/series/4076
O. Breitenstein W. Warta M. Langenkamp
Lock-in Thermography Basics and Use for Evaluating Electronic Devices and Materials
Second Edition
With 89 Figures
123
Dr. Otwin Breitenstein Max-Planck-Institut f¨ur Mikrostrukturphysik Weinberg 2, 06120 Halle, Germany E-mail: [email protected]
Dr. Wilhelm Warta Fraunhofer-Institut f¨ur Solare Energiesysteme (ISE), Heidenhofstr. 2, 79110 Freiburg, Germany E-mail: [email protected]
Dr. Martin Langenkamp Sandhof 6b, 24768 Rendsburg, Germany E-mail: [email protected]
Series Editors:
Dr. Kiyoo Itoh Hitachi Ltd., Central Research Laboratory, 1-280 Higashi-Koigakubo Kokubunji-shi, Tokyo 185-8601, Japan
Professor Thomas Lee Stanford University, Department of Electrical Engineering, 420 Via Palou Mall, CIS-205 Stanford, CA 94305-4070, USA
Professor Takayasu Sakurai Center for Collaborative Research, University of Tokyo, 7-22-1 Roppongi Minato-ku, Tokyo 106-8558, Japan
Professor Willy M. C. Sansen Katholieke Universiteit Leuven, ESAT-MICAS, Kasteelpark Arenberg 10 3001 Leuven, Belgium
Professor Doris Schmitt-Landsiedel Technische Universit¨at M¨unchen, Lehrstuhl f¨ur Technische Elektronik Theresienstrasse 90, Geb¨aude N3, 80290 München, Germany
ISSN 1437-0387 ISBN 978-3-642-02416-0 e-ISBN 978-3-642-02417-7 DOI 10.1007/978-3-642-02417-7 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2010935594 © Springer-Verlag Berlin Heidelberg 2003, 2010 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specif ically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microf ilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specif
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