Optical properties and morphology analysis of hexagonal WO 3 thin films obtained by electron beam evaporation
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Optical properties and morphology analysis of hexagonal WO3 thin films obtained by electron beam evaporation Reza Shakoury1 , Ali Arman2 , Sahar Rezaee3,* , Alireza Grayeli Korpi4, Sławomir Kulesza5 , Carlos Luna6 , Mirosław Bramowicz5 , and Mohsen Mardani2,*
1
Department of Physics, Faculty of Science, Imam Khomeini International University, Qazvin, Iran Vacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran 3 Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran 4 Physics and Accelerators Research School, Nuclear Sciences and Technology Research Institute, Tehran, Iran 5 Faculty of Technical Sciences, University of Warmia and Mazury in Olsztyn, Oczapowskiego 11, 11-041 Olsztyn, Poland 6 Facultad de Ciencias Físico Matemáticas (FCFM), Universidad Autónoma de Nuevo León (UANL), San Nicolás de Los Garza Nuevo León, Av. Universidad s/n, 66455 Nuevo León, Mexico 2
Received: 1 June 2020
ABSTRACT
Accepted: 9 November 2020
WO3 films with thicknesses between 550 and 853 nm were deposited on glass substrates using the electron beam evaporation method at room temperature. The microstructures and surface roughness of the films were studied by X-ray diffraction (XRD) and atomic force microscopy (AFM). It was observed that the crystalline structure of the WO3 thin films significantly changes from the amorphous to crystalline states with a crystalline texture, and the mosaicity and grain size dependent on the film thickness. The transmittance spectra of the obtained WO3 films were measured in the range from 340 to 850 nm, and the Swanepoel method was used to determine the refractive indices and the thicknesses of the WO3 films. The obtained optical functions reveal the highly homogeneous structure of the films.
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Springer Science+Business
Media, LLC, part of Springer Nature 2020
1 Introduction Due to the technological importance of transition metal oxides, they have been used in many different applications. For instance, since they are functional components of catalysts, they are applied to change hydrocarbons into other chemical products. They are
also used as electrode materials in electrochemical processes and as electrically conductive films in the electronic industry [1–4]. As a predominantly ionic solids group, a wide range of optical and electrical properties can be seen for transition metal oxides. Many of these materials have considerable uses in electronic and magnetic
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https://doi.org/10.1007/s10854-020-04858-7
J Mater Sci: Mater Electron
devices and other applications. The electron energy band structures of 3d oxides have been widely studied in recent years [5–8]. These materials are good candidates for controlled electrical conductive elements because their conduction band is mainly composed of the metal atom d orbital [7, 9]. Electron concentration of tungsten oxide, an n-type semiconductor, depends on the stoichiometry defect concentrations, such as oxygen vac
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