All CO 2 -Processed Fluoropolymer-Containing Photoresist Systems
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All CO2-Processed Fluoropolymer-Containing Photoresist Systems a
Devin Flowersa, Erik Hogganb, Joseph M. DeSimonea,b,, and Ruben Carbonellb Department of Chemistry, University of North Carolina at Chapel Hill, Venable Hall CB# 3290, Chapel Hill, NC 27599 b Department of Chemical Engineering, North Carolina State University, 1017 Main Campus Dr. Suite 3600, Raleigh, NC 27606
ABSTRACT Currently, the microlithography industry creates large amounts of organic and aqueous wastes in the production of semiconductors. Using carbon dioxide can possibly eliminate the majority of these waste solvents as well as eliminate the image collapse problems shown with aqueous base development. We will discuss the use of carbon dioxide to replace the most solvent intensive steps of the microlithography process, spin coating, developing, and stripping. However, before CO2 can replace conventional solvents, photoresist systems must be designed and synthesized to be compatible with CO2. These photoresist systems must be soluble in liquid CO2 to insure that thin-uniform coatings can be produced by spin coating while maintaining characteristics of conventional resist systems such as low absorbance, high sensitivity, solubility contrast, good resolution, and etch resistance. Using our CO2 compatible resist system, we will demonstrate the ability of CO2 to spin coat uniform thin-films which (after exposing and PEB) can be developed using scCO2 to produce lithography features that may be stripped in CO2. Thus, revealing the enormous potential of CO2 to provide the microlithography industry an opportunity to escape its water and organic solvent dependence as it moves toward 157nm lithography. INTRODUCTION Over, the past 10 years the scientific community has vigorously researched carbon dioxide as a means for eliminating the enormous amounts of hazardous waste streams produced by industry each year. Research has been fueled in this area because carbon dioxide (CO2) is non-toxic, non-flammable, inexpensive, environmentally benign, and easily recyclable. Also, as a compressed fluid, CO2 has a highly tunable density and solvency that varies with small changes in temperature and/or pressure. These properties have lead the food, pharmaceuticals, performance polymers, dry cleaning, and dyeing industries to replace toxic chemicals and water in some industrial processes with supercritical (sc) and liquid carbon dioxide. Growing concern for the environment and the bottom-line has prompted many companies and industries to not bring new processes that pollute the earth into manufacturing. By using CO2, these industrials have cut the demand for limited local water supplies while reducing the environmental impact, health and safety concerns, and cost associated with the usage and disposal of toxic chemicals. As part of the NSF-STC’s vision, we seek out ways of reducing the waste-intensive wet processes found in important industries and replacing them with dry processes. However, we try to put these changes in the context of cost reduction and better perform
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