Evolution of PERC from Al-BSF: optimization based on root cause analysis

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Evolution of PERC from Al‑BSF: optimization based on root cause analysis Nabin Chandra Mandal1 · Shiladitya Acharya1 · Susmita Biswas1 · Tamalika Panda1 · Sourav Sadhukhan1 · Jayasree Roy Sharma1 · Sukanta Bose1 · Gourab Das1 · Arindam Kole1 · Anupam Nandi1 · Santanu Maity1 · Partha Chaudhuri1 · Hiranmay Saha1 · Subhendu Guha2 Received: 2 March 2020 / Accepted: 22 June 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020

Abstract Passivated emitter rear contact (PERC) solar cell involves upgraded adaptation of technology over the existing silicon waferbased aluminium back surface field (Al-BSF) solar cell. The lower efficiency of Al-BSF is caused by a few drawbacks e.g. higher rear surface recombination and weaker electric field at the rear surface. These technical shortcomings can be mitigated by incorporating field-effect passivation (FEP) layer viz. aluminium oxide (­ Al2O3) at the rear surface with a capping layer of ­SiNX on it. Conventionally two new processing steps utilizing two expensive equipments, green laser (532 nm) for laser ablation of the FEP and ­SiNX capping layer stack at the rear surface and single side etcher for rear side polishing of wafer are used for manufacturing of PERC cells. In this paper, we have shown that instead of these two new expensive processing equipments we can use the IR laser (1024 nm) and RIE etcher, which are commonly available for Al-BSF manufacturing line, for the fabrication of PERC solar cells. Using p-type wafers of rather modest quality (minority carrier lifetime of ≥10 µs) we have demonstrated improvement of the efficiency from 18.71 to 19.62% and enhancements in VOC and JSC from 628 to 646 mV and 38.59 mA/cm2 to 39.82 mA/cm2, respectively. A thorough root-cause analysis has been carried out to optimize the two new approaches within the existing Al-BSF line for the fabrication of PERC solar cell. Keywords  Al-BSF · PERC · Passivation · Al2O3 · Solar cell

1 Introduction The concept of advanced solar cell structure like passivated emitter rear contact (PERC) solar cell was first realized at UNSW by M. A. Green and his group in the year 1984 [1]. The performance of the solar cell structure was improved to 21.2% through higher open-circuit voltage and optimized front electrode design [2]. Further technological advances in the same structure improved the efficiency to 22.8% [3]. This new result has drawn enormous attention from photovoltaic researchers and industries and many reputed solar cell manufacturers have already initiated producing PERC solar cells. Further improvement has been achieved by introducing the * Anupam Nandi [email protected] 1



Centre of Excellence for Green Energy and Sensor Systems, Indian Institute of Engineering Science and Technology, Shibpur, India



ESGEE International, Bloomfield Hills, MI 48304, USA

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passivated emitter rear local (PERL) contact solar cell which exhibits efficiency as high as 25% [4] but the complex fabrication technique of PERL solar cell has inhibited large-scale adaptation of this process by i