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PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS S. Helhel,1,2 A. R. Ellingboe,2 O. Cerezci3 and C. Gaman2 1

Akdeniz Univ., Engineering F., Electrical and Electronics Engineering, Antalya, Turkey 2 Dublin City University, School of Physics—PRL, Glasnevin Dublin 9, Ireland 3 Sakarya Uni., Engineering F., Electrical and Electronics Engineering, Adapazarı, Turkey Received at 27 July 2006

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