Room temperature gas sensor based on La 2 O 3 doped CuO thin films
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Room temperature gas sensor based on La2O3 doped CuO thin films Jamal M. Rzaij1 · Nadir F. Habubi2 Received: 9 April 2020 / Accepted: 22 June 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract In this work, undoped and lanthanum doped cupric oxide (CuO:La) nanorods structured thin films were deposited at different concentrations (CLO) on p-type silicon substrates using the spray pyrolysis technique at 350 °C. XRD, AFM, SEM, and EDX techniques were used to investigate the structural, morphological, and compositional analysis, respectively. A decrease in crystallite size was observed from 13.4 to 7.75 nm and even the peak diffraction intensity decreased with an increase in La concentration. The hexagonal structure of the L a2O3 phase with poor orientation planes was observed at 7 wt% La. Amplitude parameters, grain size, and atoms distribution were discussed from AFM analysis. SEM images show a uniform distribution and homogeneous crystalline construction supported by quadrilateral pillars with nanorods-like in shape. The sensitivity, recovery, and response time for CLO thin films as room temperature N O2 sensor devices were calculated. The effect of lanthanum concentration on the sensing mechanism of CuO thin films also has been reported. Keywords Room temperature · Gas sensor · Thin films · NO2 · CuO
1 Introduction Due to the increase in the environmental pollution caused by the gases emitted from the exhaust of the cars and the smokestacks of the commercial factories as well as the leaking gas as casual accidents, there is an urgent need to improve and develop gas sensors according to different manufacturing methods [1]. There are many types of gas sensors such as chemical, acoustic, biochemical, and other sensors. The most common are semiconductor gas sensors that are easy and cheap to manufacture with quick response and high sensitivity [2], as well as the ability to detect the presence of very low concentrations of many gases types that may be harmful to human life [3]. Copper Oxide in both configurable, cuprous oxide (Cu2O) and cupric oxide (CuO) are considered as important semiconductor oxides that being used in electronics, gas sensors, solar cells, and electrochemical applications. The important characteristics of a cupric oxide such as non-toxic oxide, which is widely available in nature, * Nadir F. Habubi [email protected] 1
Department of Physics, College of Science, University of Anbar, Ramadi, Iraq
Department of Physics, College of Education, Mustansiriyah University, Baghdad, Iraq
2
cheaply priced, and have a positive electrical conductivity that also made it as good catalysts [4]. Many researchers have prepared cupric oxide thin films using various preparation techniques to detect different gases, Bari et al. use Nanostructured CuO thin films deposited by spray pyrolysis for H 2S gas detection [5]. Nanorods of CuO for organic compounds and H2 gas sensors were fabricated using RF (Radio Frequency) magnetron sputtering by Sarca et al. [6]. W
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