Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption
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Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption Christopher N. LaFratta, Richard A. Farrer, Tommaso Baldacchini, Juliet Znovena, Daniel Lim, Anne-Cécile Pons, Josefina Pons, Kevin O’Malley, Zeynel Bayindir, Michael J. Naughton, Bahaa E. A. Saleh, Malvin C. Teich, and John T. Fourkas 1 Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A. 2 Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A. 3 Department of Electrical & Computer Engineering, Quantum Imaging Laboratory, Boston University, Boston, MA 02215, U.S.A. ABSTRACT Multiphoton absorption has become a powerful technique for the creation of threedimensional micro- and nanostructures. Here we review some of our recent progress towards creating functional microdevices with multiphoton absorption. Specific thrusts of our research include development of new resins for multiphoton absorption polymerization, design of novel schemes for metal deposition, and post-fabrication ablation of polymeric structures. INTRODUCTION Multiphoton absorption [1] (MPA) is a promising new tool for the processing of materials with ultrafast lasers. The probability for the simultaneous absorption of n photons that collectively have enough energy to drive an electronic transition is proportional to the light intensity to the nth power. As a result, by focusing an ultrafast laser tightly using a microscope objective, it is possible to drive MPA efficiently only within the confines of the focal volume. If MPA is used to drive localized photochemical or photophysical processes, then 3-D objects can be sculpted by moving the position of the focal point. There is growing interest in using MPA to create microstructures composed of various materials. While the majority of work in this area has involved multiphoton absorption polymerization (MAP) [2-8], some work has also been reported on the use of MPA to deposit metals [9-11]. Here we discuss recent progress from our laboratory toward the creation of functional 3-D microstructures using MPA. EXPERIMENTAL DETAILS The system used for fabrication is common to all of our experiments. A mode-locked Ti:sapphire oscillator produces 100-fs pulses at a repetition rate of 76 MHz. The center wavelength of the pulses is broadly tunable, but is generally set near 790 nm. The laser output is sent into the reflected light lamp port of an upright microscope (Zeiss AxioPlan2) and is reflected by a 90% beam splitter to the back aperture of an objective that focuses it into a sample. The sample is mounted on a computerized stage (Ludl BioPrecision) that is used to control the position in the xy plane; the microscope focusing drive is used to control the z position. The resolution is 100 nm in the x and y directions and 25 nm in the z direction. A computer program is used to scan out the desired 3-D pattern and to control a shutter in the beam path. Fabrication
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