RF MEMS Switches and Integrated Switching Circuits Design, Fabricati
Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of
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MEMS Reference Shelf Editor-in-Chief Stephen D. Senturia Massachusetts Institute of Technology Professor of Electrical Engineering Emeritus Series Editors: Roger T. Howe Department of Electrical Engineering Stanford University Stanford, California Antonio J. Ricco Small Satellite Division NASA Ames Research Center Moffett Field, California
For other titles in this series, go to: www.springer.com/series/7724
Ai Qun Liu
RF MEMS Switches and Integrated Switching Circuits Design, Fabrication, and Test
Chapter Co-Authors Aibin Yu Institute of Microelectronics, Singapore
Ming Tang Institute of Microelectronics, Singapore
Muhammad Faeyz Karim Institute for Infocomm Research, Singapore
Selin Teo Hwee Gee Institute of Microelectronics, Singapore ‡
The co-authors are PhD students of Ai Qun Liu
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Dr. Ai Qun Liu School of Electrical & Electronic Engineering Nanyang Technological University Nanyang Avenue Singapore 639798 [email protected]
ISSN 1936-4407 ISBN 978-0-387-46261-5 e-ISBN 978-0-387-46262-2 DOI 10.1007/978-0-387-46262-2 Springer New York Dordrecht Heidelberg London Library of Congress Control Number: 2010930386 © Springer Science+Business Media, LLC 2010 All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
This book is dedicated to my beloved mother and late father
Preface
Wireless communication has led to an explosive technological advancement and breakthrough in radio frequency microelectromechanical systems (RF MEMS) technology. The technology is seen to have the potential of replacing the mechanical, wireless, and semiconductor technology in future communication systems as well as communication satellites. In many cases, the RF MEMS technology does not only offer devices with substantial reduction in size, weight, cost, and power consumption but also promises more superior performance compared to those offered by the conventional technology. By combining high RF performance, low cost, and low power consumption, RF MEMS devices allow one to explore new architectures and configurations which were not possible with the traditional technology and expand its potential applications from defense-related products to personal communication devices. This book, RF MEMS Switches and Integrated Switching Circuits – Design, Fabrication and Test, p
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