Semiconductor-On-Insulator Materials for Nanoelectronics Applications
"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemO
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Alexei Nazarov J.-P. Colinge Prof. Francis Balestra Prof. Jean-Pierre Raskin Prof. Francisco Gamiz Prof. V.S. Lysenko •
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Editors
Semiconductor-On-Insulator Materials for Nanoelectronics Applications
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Editors Prof. Dr. Alexei Nazarov Lashkaryov Institute of Semiconductor Physics National Academy of Sciences of Ukraine Prospect Nauki 41 Kyiv 03028, Ukraine e-mail: [email protected]
Prof. J.-P. Colinge Tyndall National Institute ‘‘Lee Maltings’’ Prospect Row University College Cork Ireland e-mail: [email protected]
Prof. Francis Balestra Sinano Institute IMEP-LAHC rue Parvis Louis Ne´el 3 38016 Grenoble Cedex 1 France
Prof. Jean-Pierre Raskin Microwave Laboratory Universite´ Catholique de Louvain Place du Levant 3 a´ B-1348 Louvain Belgium
Prof. Francisco Gamiz Nanoelectronics Research Group Departmento de Electro´nica Universidad de Granada Granada Spain
Prof. V.S. Lysenko Lashkaryov Institute of Semiconductor Physics National Academy of Sciences of Ukraine Prospect Nauki 41 Kyiv 03028, Ukraine
ISSN 1612-1317
e-ISSN 1868-1212
ISBN 978-3-642-15867-4
e-ISBN 978-3-642-15868-1
DOI 10.1007/978-3-642-15868-1 Springer Heidelberg Dordrecht London New York Ó Springer-Verlag Berlin Heidelberg 2011 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: deblik, Berlin Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Introduction
This Book is devoted to the fast evolving field of nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) substrates. It compiles the results of research work from leading companies and universities in Europe, Russia, Brazil and Ukraine. Main of the Authors are involved in the NANOSIL Network of Excellence and the Thematic Network on Silicon on Insulator Technology, Devices and Circuits EUROSOI+ , both of which are funded by the European Commission under the 7th Framework Program of the European Community. This Book describes different technologies and approaches used to fabricate Semiconductor-On-Insulator materials, devices and systems. The contributed papers are articul
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