Applied Scanning Probe Methods VI Characterization

The scanning probe microscopy ?eld has been rapidly expanding. It is a demanding task to collect a timely overview of this ?eld with an emphasis on technical dev- opments and industrial applications. It became evident while editing Vols. I–IV that a large

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B. Bhushan S. Kawata (Eds.)

Applied Scanning Probe Methods VI Characterization

 

NanoScience and Technology

NanoScience and Technology Series Editors: P. Avouris B. Bhushan D. Bimberg K. von Klitzing H. Sakaki R. Wiesendanger The series NanoScience and Technology is focused on the fascinating nano-world, mesoscopic physics, analysis with atomic resolution, nano and quantum-effect devices, nanomechanics and atomic-scale processes. All the basic aspects and technologyoriented developments in this emerging discipline are covered by comprehensive and timely books. The series constitutes a survey of the relevant special topics, which are presented by leading experts in the field. These books will appeal to researchers, engineers, and advanced students. Applied Scanning Probe Methods I Editors: B. Bhushan, H. Fuchs, and S. Hosaka Nanostructures Theory and Modeling By C. Delerue and M. Lannoo Nanoscale Characterisation of Ferroelectric Materials Scanning Probe Microscopy Approach Editors: M. Alexe and A. Gruverman Magnetic Microscopy of Nanostructures Editors: H. Hopster and H.P. Oepen

Applied Scanning Probe Methods II Scanning Probe Microscopy Techniques Editors: B. Bhushan, H. Fuchs Applied Scanning Probe Methods III Characterization Editors: B. Bhushan, H. Fuchs Applied Scanning Probe Methods IV Industrial Application Editors: B. Bhushan, H. Fuchs Nanocatalysis Editors: U. Heiz, U. Landman

Silicon Quantum Integrated Circuits Silicon-Germanium Heterostructure Devices: Basics and Realisations By E. Kasper, D.J. Paul

Roadmap of Scanning Probe Microscopy Editors: S. Morita

The Physics of Nanotubes Fundamentals of Theory, Optics and Transport Devices Editors: S.V. Rotkin and S. Subramoney

Nanostructures – Fabrication and Analysis Editor: H. Nejo

Single Molecule Chemistry and Physics An Introduction By C. Wang, C. Bai Atomic Force Microscopy, Scanning Nearfield Optical Microscopy and Nanoscratching Application to Rough and Natural Surfaces By G. Kaupp

Applied Scanning Probe Methods V Scanning Probe Microscopy Techniques Editors: B. Bhushan, H. Fuchs, S. Kawata Applied Scanning Probe Methods VI Characterization Editors: B. Bhushan, S. Kawata Applied Scanning Probe Methods VII Biomimetics and Industrial Applications Editors: B. Bhushan, H. Fuchs

Bharat Bhushan Satoshi Kawata (Eds.)

Applied Scanning Probe Methods VI Characterization

With 195 Figures and 7 Tables

123

Editors: Professor Bharat Bhushan Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM) W 390 Scott Laboratory, 201 W. 19th Avenue The Ohio State University, Columbus Ohio 43210-1142, USA e-mail: [email protected]

Satoshi Kawata Osaka City University, Graduate School of Science, Department of Mathematics Sugimoto 3-3-138, 558-8585 Osaka, Japan e-mail: [email protected]

Series Editors: Professor Dr. Phaedon Avouris IBM Research Division Nanometer Scale Science & Technology Thomas J. Watson Research Center, P.O. Box 218 Yorktown Heights, NY 10598, USA Professor Bharat Bhushan Nanotribology Laboratory for Information Storage and