Nanoscale Characterization of Nanostructures and Nanodevices by Scanning Probe Microscopy
Semiconductor nanostructures such as quantum wires and quantum dots are receiving wide attention as new materials for the next generation of semiconductor devices, because many device properties are expected to be improved by quantum confinement effects [
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Springer-Verlag Berlin Heidelberg GmbH
microtechnology and mems Series Editor: H. Baltes D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange, O. Brand, and H. Baltes Micromachines as Tools for Nanotechnology Editor: H. Fujita
H. Fujita (Ed.)
Micromachines as Tools for Nanotechnology With 183 Figures
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Professor I [iroyuki Pujita Th(' Univ('rsity ofTokyo [nstitut(' of [ndustrial Sci('nc(' 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, lapan E-mail: fujita@iis .u-tokyo.ac.jp
Scrics Edilors: Professor Dr, I r. l3altcs ETH Ziirich, Phy~ical Electronics Laboralory ETI 1 [lo('Jlgg('rb('rg, 1[1'T-l [6, 1:\093 llirich, Switz('rland
Profcssor Dr. Dorian Licpmann Univ('rsity of California, D('partment of Bioengineering 466 Evan~ Hali, #1762, Berkeley, CA 94720-1762, USA
ISSN 1615-8}26
ISBN 978-3-642-62465-0 l.ibrary of Co ngn'S~ Cala loging_in_Publica tionllata Fujila, Hiroyuki . 1952Mircromachin
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