BioNanoFluidic MEMS
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various a
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MEMS Reference Shelf Series Editor:
Stephen D. Senturia Professor of Electrical Engineering, Emeritus Massachusetts Institute of Technology Cambridge, Massachusetts
BioNanoFluidic MEMS Peter Hesketh, ed. ISBN 978-0-387-46281-3 Microfluidic Technologies for Miniaturized Analysis Systems Edited by Steffen Hardt and Friedhelm Schöenfeld, eds. ISBN 978-0-387-28597-9 Forthcoming Titles Self-assembly from Nano to Milli Scales Karl F. Böhringer ISBN 978-0-387-30062-7 Photonic Microsystems Olav Solgaard ISBN 978-0-387-29022-5 Micro Electro Mechanical Systems: A Design Approach Kanakasabapathi Subramanian ISBN 978-0-387-32476-0 Experimental Characterization Techniques for Micro-Nanoscale Devices Kimberly L. Turner and Peter G. Hartwell ISBN 978-0-387-30862-3 Microelectroacoustics: Sensing and Actuation Mark Sheplak and Peter V. Loeppert ISBN 978-0-387-32471-5 Inertial Microsensors Andrei M. Shkel ISBN 978-0-387-35540-5
Peter J. Hesketh Editor
BioNanoFluidic MEMS
Editor Peter J. Hesketh George W. Woodruff School of Mechanical Engineering Georgia Institute of Technology Atlanta, GA 30332-0405
ISBN: 978-0-387-46281-3
e-ISBN: 978-0-387-46283-7
Library of Congress Control Number: 2007932882 c 2008 Springer Science+Business Media, LLC All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC., 233 Spring Street, New York, NY10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights.
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Preface
This collaboration evolved from contributions by faculty members who participated in workshops on NanoBioFluidic Micro Electro-Mechanical Systems (MEMS) at the Georgia Institute of Technology, Atlanta, Georgia, in November, 2005 and June, 2006. The objective of these workshops was to bring together researchers, engineers, faculty, and students to review the interdisciplinary topics related to miniaturization and to nanomaterials processing, with a particular emphasis on the development of sensors and microfluidic systems. The workshops were events attended by participants from industry and academia, with lectures, hands-on laboratory sessions, student poster sessions, and panel discussions. These chapters cover current research topics pertinent to the field, including: materials synthesis, nanofabrication methods, nanoscale structures’ properties, nanopores, nanomaterial-based chemical sensors, biomedical applications, and nanodevice packaging. The emphasis has been placed on a review of fundamental pri
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