Call for Papers: 1986 MRS Fall Meeting
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i o n a l L a b o r a t o r i e s Division 1111 P . O . Box 5 8 0 0 Albuquerque, NM 87185 (505) 8 4 4 - 7 6 8 1 M.O. Thompson D e p t . of M a t e r i a l s Science Cornell University Ithaca, NY 1 4 8 5 3 (607) 2 5 6 - 4 7 1 4
J.S. Williams Royal Melbourne Inst. G.P.O. Box 2476V Melbourne, Victoria 3001 Australia (03)660-2459 P h o t o n , B e a m and P l a s m a S t i m u l a t e d Chemical Processes at Surfaces Symposium B This s y m p o s i u m will highlight w o r k using l a s e r s o r c h a r g e d particle b e a m s to e n h a n c e c h e m i c a l p r o c e s s e s at s u r f a c e s . S t u d i e s involving novel u s e s of i n c o h e r e n t light o r p l a s m a s will also be f e a t u r e d . T h e s y m p o s i u m is a c o n t i n u a t i o n of earlier s y m p o s i a on d i r e c t - l a s e r and b e a m - i n d u c e d chemical p r o c e s s i n g and modification of microelect r o n i c m a t e r i a l s . Topics will include e n e r g y b e a m e n h a n c e m e n t s for i n t e r a c t i o n s of g a s e s , liquids, a b s o r b e d l a y e r s , and thin films w i t h m e t a l s , s e m i c o n d u c t o r s , and i n s u l a t o r s . P a r t i c u l a r a t t e n t i o n will b e g i v e n to f u n d a m e n t a l m e c h a n i s m s and p o t e n t i a l m i c r o e l e c t r o n i c s applications. Topics for which p a p e r s are solicited include: F u n d a m e n t a l i n t e r a c t i o n s at surfaces: • I n f l u e n c e of p h o t o n s and c h a r g e d p a r t i cles on m e c h a n i s m s of surface c h e m i s t r y , adsorption, migration, desorption and nucleation • M o d e l i n g and in-situ diagnosis of i n t e r a c t i o n s on and near surfaces P h o t o n and c h a r g e d particle induced d e p o sition, etching, doping and surface modification: • Pyrolytic, p h o t o l y t i c and p h o t o e l e c t r o chemical t e c h n i q u e s • P r o c e s s e s induced by focused s p o t s , p r o jected p a t t e r n s o r broad area e x p o s u r e • Symbiotic p h o t o n , beam, plasma and t h e r m a l effects • Epitaxial g r o w t h (films, h e t e r o s t r u c t u r e s , superlattices) • Novel plasma p r o c e s s e s (epitaxy, etc.) Applications: • C u s t o m i z a t i o n and repair of i n t e g r a t e d circuits • Mask writing • Gratings • Discrete optical and electronic devices A u t h o r s should s u b m i t a b s t r a c t s in triplicate to o n e o f t h e s y m p o s i u m chairs by J u n e 13, 1986.
Symposium Chairs: V i n c e n t M. D o n n e l l y Room 1A-217 A T & T Bell L a b o r a t o r i e s 6 0 0 M o u n t a i n Ave. M u r r a y Hill, NJ 07974 (201) 5 8 2 - 3 4 7 1 Irving P. H e r m a n P . O . Box 808, L-278 L a w r e n c e L i v e r m o r e National L a b o r a t o r y Livermore, CA 94550 (415) 4 2 2 - 1 1 3 2 Masataka Hirose Faculty of E n g i n e e r i n g Hiroshima University H i g a s h i h i r o s h i m a 724, Japan Science and T e c h n o l o g y of Microfabrication Symposium C T h i s s y m p o s i u m is d e v o t e d to t h e fund a
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