Call for Papers: 1987 MRS Spring Meeting
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Symposium A Heteroepitaxy on Silicon T e c h n o l o g y T h i s s y m p o s i u m is t h e sequel to t h e very successful o n e d e v o t e d to t h e same topic at t h e 1986 S p r i n g M R S M e e t i n g . T h i s series of s y m p o s i a p r o v i d e s t h e only f o r u m for d i s c u s s i n g t h e m a t e r i a l s and device issues involved in h e t e r o e p i t a x y on Si in a focused and t h o r o u g h m a n n e r . T h e successful dev e l o p m e n t of h e t e r o e p i t a x y on Si w o u l d h a v e f a r - r e a c h i n g t e c h n o l o g i c a l applications, r a n g i n g from optical c o m m u n i c a t i o n ,
to h i g h - s p e e d and novel i n t e g r a t e d circuits to s o l a r cells. I m p r e s s i v e p r o g r e s s h a s recently occurred in t h e g r o w t h and c h a r a c t e r i z a t i o n of m a t e r i a l s y s t e m s w h i c h w e r e , until r e c e n t l y , t h o u g h t to be i n c o m p a t i b l e . E x c i t i n g r e s u l t s h a v e b e e n o b t a i n e d in devices and circuits fabricated w i t h t h e s e new composite materials. This symposium will p r o v i d e a f o r u m for p r e s e n t i n g t h e s e r e s u l t s and c h a r t i n g f u t u r e d i r e c t i o n s . P a p e r s a r e solicited in t h e f o l l o w i n g areas: • F u n d a m e n t a l s of h e t e r o e p i t a x i a l g r o w t h on Si • H e t e r o e p i t a x y on Si f o r i n t e g r a t e d circuit and o p t o e l e c t r o n i c applications • N o v e l devices and circuits u s i n g h e t e r o epitaxy on Si • G a A s and o t h e r III-V c o m p o u n d s on Si • II-VI c o m p o u n d s on Si • H e t e r o e p i t a x i a l a p p r o a c h e s to t h r e e d i m e n s i o n a l i n t e g r a t i o n on Si • S u p e r l a t t i c e g r o w t h on Si • Epitaxial i n s u l a t o r s and m e t a l s (including silicides) on Si • G r o u p IV h e t e r o e p i t a x y Symposium Chairs:
• R T P for i m p l a n t a t i o n a n n e a l i n g , d o p a n t activation and diffusion • D e f e c t s and m i c r o s t r u c t u r e in R T P m a terials • R T P of silicides and m e t a l s • Dielectrics, rapid t h e r m a l oxidation, rapid thermal nitridation • Rapid t h e r m a l p r o c e s s i n g of devices and circuits • A p p l i c a t i o n s of R T P to c o m p o u n d s e m i conductors • R e c e n t d e v e l o p m e n t s in R T P e q u i p m e n t • N e w applications of R T P Symfwsium Chairs: Syd R. Wilson S R D L , M o t o r o l a Inc. 5 0 0 5 E. M c D o w e l l Rd. Phoenix, AZ 85008 (602) 2 4 4 - 4 6 3 7 D. Eirug Davies EOARD 2 3 3 - 2 3 1 Old M a r y l e b o n e Rd. L o n d o n N W l 5 T H , U.K. 01-409-4437 Ron Powell V a r i a n Associates MS K-403 611 H a n s e n Way Palo Alto, CA 94304 (415) 4 2 4 - 5 0 7 8
John C O Fan Kopin C o r p o r a t i o n 6 9 5 S t a n d i s h Blvd. S t a n d i s h I n d u s t r i a l Park T a u n t o n , MA 02780 (617) 8 2 4 - 6 6 9 6 Julia M. Phillips A T & T Bell L a b o r a t o r i e s R o o m 1E-431 600 M o u n t a i n A v e n u
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