Materials for Information Technology Devices, Interconnects and Pack

The fast-developing information technology industry is driving a need for new materials in order to facilitate the development of more reliable microelectronic products. Materials for Information Technology is an up-to-date overview of current development

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Series Editor Professor Brian Derby, Professor of Materials Science Manchester Materials Science Centre, Grosvenor Street, Manchester, M1 7HS, UK

Other titles published in this series: Fusion Bonding of Polymer Composites C. Ageorges and L. Ye Composite Materials D.D.L. Chung Titanium G. Lütjering and J.C. Williams Corrosion of Metals H. Kaesche Corrosion and Protection E. Bardal Intelligent Macromolecules for Smart Devices L. Dai Microstructure of Steels and Cast Irons M. Durand-Charre Phase Diagrams and Heterogeneous Equilibria B. Predel, M. Hoch and M. Pool Computational Mechanics of Composite Materials ´ski M. Kamin Gallium Nitride Processing for Electronics, Sensors and Spintronics S.J. Pearton, C.R. Abernathy and F. Ren Publication due September 2005 Thermoelectricity J.P. Heremans, G. Chen and M.S. Dresselhaus Publication due May 2006 Computer Modelling of Sintering at Different Length Scales J. Pan Publication due June 2006 Computational Quantum Mechanics for Materials Engineers L. Vitos Publication due June 2006 Fuel Cell Technology N. Sammes Publication due December 2005 Shape Memory Alloy Thin Films A. Ishida and S. Miyazaki Publication due March 2007

Ehrenfried Zschech, Caroline Whelan and Thomas Mikolajick (Eds.)

Materials for InformationTechnology Devices, Interconnects and Packaging

With 338 Figures

123

Ehrenfried Zschech, Dr. rer. nat. Materials Analysis Department, AMD Saxony Limited Liability Company & Co. KG, Wilschdorfer Landstraße 101, D-01109 Dresden, Germany Caroline Whelan, Ph.D. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Thomas Mikolajick, Dr.-Ing. Flash Technology Predevelopment, Infineon Technologies SC300, Königsbrücker Straße 180, D-01099 Dresden, Germany

British Library Cataloguing in Publication Data Euromat 2003 (2003 : Lausanne, Switzerland) Materials for information technology. - (Engineering materials and processes) 1. Microelectronics - Materials - Congresses 2. Information technology - Congresses I. Title II. Zschech, Ehrenfried III. Whelan, Caroline IV. Mikolajick, Thomas 621.3’815 ISBN-10: 1852339411 Library of Congress Control Number: 2005924304 Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. Engineering Materials and Processes ISSN 1619-0181 ISBN-10: 1-85233-941-1 ISBN-13: 978-1-85233-941-8 Springer Science+Business Media springeronline.com © Springer-Verlag London Limited 2005 The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for genera

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