Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit
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FABRICATING MICROBOLOMETER ARRAY ON UNPLANAR READOUT INTEGRATED CIRCUIT Hongchen Wang,1 Xinjian Yi,1,3 Jianjun Lai,1 and Yi Li1,2 1
Department of Optoelectronic Engineer, Huazhong University of Science & Technology, Wuhan 430074, China 2 The National Laboratory for Optoelectronics, 1037 Loyu Road, Wuhan 430074, China 3 The Key Laboratory of Education Ministry for Imaging Recognization and Intelligence Control, Huazhong University of Science and Technology Wuhan 430074, China Tel.: +86-27-87557603; Fax: +86-27-87542087 E-mail address: [email protected] Received 31 January 2005
751 0195-9271/05/0500-0751/0 © 2005 Springer Science+Business Media, Inc.
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