Noncontact Atomic Force Microscopy and Its Related Topics
The scanning probe microscopy (SPM) such as the STM and the NC-AFM is the basic technology for the nanotechnology and also for the future bottom-up process. In Sect. 13.1 , the principles of AFM such as operating modes and the frequency modulation method
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The scanning tunneling microscope (STM) is an atomic tool based on an electric method that measures the tunneling current between a conductive tip and a conductive surface. It can electrically observe individual atoms/molecules. It can characterize or analyze the electronic nature around surface atoms/molecules. In addition, it can manipulate individual atoms/molecules. Hence, the STM is the first generation of atom/molecule technology. On the other hand, the atomic force microscope (AFM) is a unique atomic tool based on a mechanical method that can deal with even the insulator surface. Since the invention of noncontactAFM (NC-AFM) in 1995, the NC-AFM and the NC-AFMbased method have rapidly developed into a powerful surface tool on atomic/molecular scales, because the NC-AFM has the following characteristics: (1) it has true atomic resolution, (2) it can measure atomic force (so-called atomic force spectroscopy), (3) it can observe even insulators, and (4) it can measure mechanical responses such as elastic deformation. Thus, the NC-AFM
13.1 Principles of Noncontact Atomic Force Microscope (NC-AFM) ............................. 13.1.1 Imaging Signal in AFM .................. 13.1.2 Experimental Measurement and Noise ................................... 13.1.3 Static AFM Operating Mode ............ 13.1.4 Dynamic AFM Operating Mode........ 13.1.5 The Four Additional Challenges Faced by AFM............................... 13.1.6 Frequency-Modulation AFM (FM-AFM) .................................... 13.1.7 Relation Between Frequency Shift and Forces .................................. 13.1.8 Noise in Frequency-Modulation AFM – Generic Calculation ............. 13.1.9 Conclusion .................................. 13.2 Applications to Semiconductors ............. 13.2.1 Si(111)7×7 Surface .......................... 13.2.2 Si(100)2×1 and Si(100)2×1:H Monohydride Surfaces .................. 13.2.3 Metal-Deposited Si Surface............ 13.3 Applications to Insulators...................... 13.3.1 Alkali Halides, Fluorides, and Metal Oxides ......................... 13.3.2 Atomically Resolved Imaging of a NiO(001) Surface ..................... 13.3.3 Atomically Resolved Imaging Using Noncoated and Fe-Coated Si Tips ......................................... 13.4 Applications to Molecules ...................... 13.4.1 Why Molecules and What Molecules? .................................. 13.4.2 Mechanism of Molecular Imaging ... 13.4.3 Perspectives ................................
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is the second generation of atom/molecule technology. The scanning probe microscopy (SPM) such as the STM and the NC-AFM is the basic technology for nanotechnology and also for the future bottom-up process. In Sect. 13.1, principles of NC-AFM will be fully introduced. Then, in Sect. 13.2, applications to semi-
Part B 13
The scanning probe microscopy (SPM) such as the STM and the NC-AFM is the bas
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