Rapid large-scale Characterization of CVD Graphene Layers on Glass using Fluorescence Quenching Microscopy
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Rapid large-scale Characterization of CVD Graphene Layers on Glass using Fluorescence Quenching Microscopy Jennifer Reiber Kyle1, Ali Guvenc1, Wei Wang2, Jian Lin3, Maziar Ghazinejad3, Cengiz Ozkan2,3, and Mihrimah Ozkan1 1
Department of Electrical Engineering, University of California-Riverside, Riverside, CA 92521, USA. 2
Department of Materials Science & Engineering, University of California-Riverside, Riverside, CA 92521, USA. 3
Department of Mechanical Engineering, University of California-Riverside, Riverside, CA 92521, USA. ABSTRACT The exceptional electrical, optical, and mechanical properties of graphene make it a promising material for many industrial applications such as solar cells, semiconductor devices, and thermal heat sinks. However, the greatest obstacle in the use of graphene in industry is highthroughput scaling of its production and characterization. Chemical-vapor deposition growth of graphene has allowed for industrial-scale graphene production. In this work we introduce complimentary high-throughput metrology technique for characterization of chemical-vapor deposition-grown graphene. This metrology technique provides quick identification of thickness and uniformity of entire large-area chemical-vapor deposition-grown graphene sheets on a glass substrate and allows for easy identification of folds and cracks in the graphene samples. This metrology technique utilizes fluorescence quenching microscopy, which is based on resonant energy transfer between a dye molecule and graphene, to increase allow graphene visualization on the glass substrate and increase the contrast between graphene layers. INTRODUCTION Graphene is promising for many industrial applications due to its exceptional electrical, optical, thermal, and mechanical properties.[1,2] However, its use in industry is still limited because it is difficult to produce and characterize on a large scale. Graphene produced by mechanical exfoliation is of excellent quality but extremely low yield. To overcome this limitation, a new method of graphene production was developed. In this technique, graphene is grown via chemical vapor deposition (CVD) of carbon atoms on metallic substrates. CVD-grown graphene can be produced as very large sheets, with the size of the sample limited only by the substrate and growing tube. The same characteristics that make graphene extraordinary also make it difficult to characterize. A single-layer graphene sample is only ~0.4nm thick[3] and absorbs only 2.3% of incident light.[4] Therefore, on a standard substrate such as a glass microscope slide, graphene cannot be adequately visualized in a microscope using reflection or transmission optical microscopy. Common methods for characterizing graphene thickness are Raman microscopy,[5] atomic force microscopy[6] and transmission electron microscopy. While these techniques offer insight into the atomic-scale quality of graphene samples, they are slow and limited to
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characterizing small regions. To overcome these issues, large-scale optical graphene metrology te
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